D. Jeffrey Lischer

Person

Acton, MA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Load lock with integrated features
- Patent number 11,557,496
- Issue date Jan 17, 2023
- Applied Materials, Inc.
- Michael Blanchard
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for calibration of substrate temperature using...
- Patent number 11,543,296
- Issue date Jan 3, 2023
- Applied Materials, Inc.
- Eric D. Wilson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Hybrid control system for workpiece heating
- Patent number 11,545,375
- Issue date Jan 3, 2023
- Applied Materials, Inc.
- James D. Strassner
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Enhanced substrate temperature measurement apparatus, system and me...
- Patent number 11,473,978
- Issue date Oct 18, 2022
- Applied Materials, Inc.
- Dawei Sun
- G01 - MEASURING TESTING
Information Patent Grant
Substrate handling and heating system
- Patent number 10,443,934
- Issue date Oct 15, 2019
- Varian Semiconductor Equipment Associates, Inc.
- Morgan D. Evans
- F26 - DRYING
Information Patent Grant
Apparatus for heating and processing a substrate
- Patent number 9,685,303
- Issue date Jun 20, 2017
- Varian Semiconductor Equipment Associates, Inc.
- Morgan D. Evans
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Hybrid thermal electrostatic clamp
- Patent number 9,633,886
- Issue date Apr 25, 2017
- Varian Semiconductor Equipment Associates, Inc.
- Morgan D. Evans
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for improving temperature uniformity of a workpiece
- Patent number 9,633,875
- Issue date Apr 25, 2017
- Varian Semiconductor Equipment Associates, Inc.
- Dawei Sun
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Dynamic heating method and system for wafer processing
- Patent number 9,287,148
- Issue date Mar 15, 2016
- Varian Semiconductor Equipment Associates, Inc.
- Morgan D. Evans
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Current lead with a configuration to reduce heat load transfer in a...
- Patent number 8,933,335
- Issue date Jan 13, 2015
- Varian Semiconductor Equipment Associates, Inc.
- Gregory Citver
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of cooling textured workpieces with an electrostatic chuck
- Patent number 8,672,311
- Issue date Mar 18, 2014
- Varian Semiconductor Equipment Associates, Inc.
- Dale K. Stone
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Techniques for improving extracted ion beam quality using high-tran...
- Patent number 8,466,431
- Issue date Jun 18, 2013
- Varian Semiconductor Equipment Associates, Inc.
- James S. Buff
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Interfacing two insulation parts in high voltage environment
- Patent number 8,455,760
- Issue date Jun 4, 2013
- Varian Semiconductor Equipment Associates, Inc.
- Russell J. Low
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Insulator system for a terminal structure of an ion implantation sy...
- Patent number 8,143,604
- Issue date Mar 27, 2012
- Varian Semiconductor Equipment Associates, Inc.
- Russell Low
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for controlling beam current uniformity in an...
- Patent number 8,003,956
- Issue date Aug 23, 2011
- Varian Semiconductor Equipment Associates, Inc.
- D. Jeffrey Lischer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Interfacing two insulation parts in high voltage environment
- Patent number 7,863,520
- Issue date Jan 4, 2011
- Varian Semiconductor Equipment Associates, Inc.
- Russell J. Low
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Techniques for low-temperature ion implantation
- Patent number 7,528,392
- Issue date May 5, 2009
- Varian Semiconductor Equipment Associates, Inc.
- Jonathan Gerald England
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Contaminant deposition control baffle for a capacitive pressure tra...
- Patent number 6,993,973
- Issue date Feb 7, 2006
- MKS Instruments, Inc.
- D. Jeffrey Lischer
- G01 - MEASURING TESTING
Information Patent Grant
Capacitive pressure transducer with improved electrode support
- Patent number 6,105,436
- Issue date Aug 22, 2000
- MKS Instruments, Inc.
- D. Jeffrey Lischer
- G01 - MEASURING TESTING
Information Patent Grant
System for delivering a substantially constant vapor flow to a chem...
- Patent number 5,966,499
- Issue date Oct 12, 1999
- MKS Instruments, Inc.
- Luke D. Hinkle
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Pressure-based mass flow controller
- Patent number 5,868,159
- Issue date Feb 9, 1999
- MKS Instruments, Inc.
- James Loan
- G05 - CONTROLLING REGULATING

Patents Applicationslast 30 patents

Information Patent Application
CYLINDRIC DECOMPOSITION FOR EFFICIENT MITIGATION OF SUBSTRATE DEFOR...
- Publication number 20240266231
- Publication date Aug 8, 2024
- Applied Materials, Inc.
- Wonjae Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
INFLUENCE FUNCTION-BASED MITIGATION OF SUBSTRATE DEFORMATION WITH F...
- Publication number 20240266233
- Publication date Aug 8, 2024
- Applied Materials, Inc.
- Wonjae Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MITIGATION OF SADDLE DEFORMATION OF SUBSTRATES USING FILM DEPOSITIO...
- Publication number 20240266174
- Publication date Aug 8, 2024
- Applied Materials, Inc.
- Wonjae Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
OPTIMIZED FILM DEPOSITION AND ION IMPLANTATION FOR MITIGATION OF ST...
- Publication number 20240266230
- Publication date Aug 8, 2024
- Applied Materials, Inc.
- Wonjae Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Model-Based Controlled Load Lock Pumping Scheme
- Publication number 20230138326
- Publication date May 4, 2023
- Applied Materials, Inc.
- D. Jeffrey Lischer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Load Lock With Integrated Features
- Publication number 20210296146
- Publication date Sep 23, 2021
- Applied Materials, Inc.
- Michael Blanchard
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Hybrid Control System For Workpiece Heating
- Publication number 20200395233
- Publication date Dec 17, 2020
- Applied Materials, Inc.
- James D. Strassner
- G05 - CONTROLLING REGULATING
Information Patent Application
METHOD AND APPARATUS FOR CALIBRATION OF SUBSTRATE TEMPERATURE USING...
- Publication number 20200378832
- Publication date Dec 3, 2020
- Applied Materials, Inc.
- Eric D. Wilson
- G01 - MEASURING TESTING
Information Patent Application
SYSTEM AND APPARATUS FOR ENHANCED SUBSTRATE HEATING AND RAPID SUBST...
- Publication number 20200381271
- Publication date Dec 3, 2020
- Applied Materials, Inc.
- Dawei Sun
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
ENHANCED SUBSTRATE TEMPERATURE MEASUREMENT APPARATUS, SYSTEM AND ME...
- Publication number 20200378837
- Publication date Dec 3, 2020
- Applied Materials, Inc.
- Dawei Sun
- G01 - MEASURING TESTING
Information Patent Application
Substrate Handling And Heating System
- Publication number 20160329458
- Publication date Nov 10, 2016
- Varian Semiconductor Equipment Associates, Inc.
- Morgan D. Evans
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Apparatus For Heating And Processing A Substrate
- Publication number 20160329190
- Publication date Nov 10, 2016
- Varian Semiconductor Equipment Associates, Inc.
- Morgan D. Evans
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Hybrid Thermal Electrostatic Clamp
- Publication number 20160307786
- Publication date Oct 20, 2016
- Varian Semiconductor Equipment Associates, Inc.
- Morgan D. Evans
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Apparatus For Improving Temperature Uniformity Of A Workpiece
- Publication number 20160268150
- Publication date Sep 15, 2016
- Varian Semiconductor Equipment Associates, Inc.
- Dawei Sun
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Current Lead with a Configuration to Reduce Heat Load Transfer in a...
- Publication number 20130092413
- Publication date Apr 18, 2013
- Varian Semiconductor Equipment Associates, Inc.
- Gregory CITVER
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF COOLING TEXTURED WORKPIECES WITH AN ELECTROSTATIC CHUCK
- Publication number 20110291344
- Publication date Dec 1, 2011
- Varian Semiconductor Equipment Associates, Inc.
- Dale K. Stone
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INTERFACING TWO INSULATION PARTS IN HIGH VOLTAGE ENVIRONMENT
- Publication number 20110094798
- Publication date Apr 28, 2011
- Varian Semiconductor Equipment Associates, Inc.
- Russell J. Low
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
METHOD AND APPARATUS FOR CONTROLLING BEAM CURRENT UNIFORMITY IN AN...
- Publication number 20100084582
- Publication date Apr 8, 2010
- Varian Semiconductor Equipment Associates, Inc.
- D. Jeffrey LISCHER
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EMBOSSED ELECTROSTATIC CHUCK
- Publication number 20090122458
- Publication date May 14, 2009
- VARIAN SEMICONDUCTOR EPUIPMENT ASSOCIATED, INC.
- D. Jeffrey Lischer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INTERFACING TWO INSULATION PARTS IN HIGH VOLTAGE ENVIRONMENT
- Publication number 20090047801
- Publication date Feb 19, 2009
- Russell J. Low
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
TECHNIQUES FOR LOW-TEMPERATURE ION IMPLANTATION
- Publication number 20080124903
- Publication date May 29, 2008
- Varian Semiconductor Equipment Associates, Inc.
- Jonathan Gerald ENGLAND
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Insulator system for a terminal structure of an ion implantation sy...
- Publication number 20070235663
- Publication date Oct 11, 2007
- Varian Semiconductor Equipment Associates, Inc.
- Russell Low
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CONTAMINANT DEPOSITION CONTROL BAFFLE FOR A CAPACITIVE PRESSURE TRA...
- Publication number 20040226382
- Publication date Nov 18, 2004
- D. Jeffrey Lischer
- G01 - MEASURING TESTING

D. Jeffrey Lischer

Person

Patents Grantslast 30 patents

Load lock with integrated features

Method and apparatus for calibration of substrate temperature using...

Hybrid control system for workpiece heating

Enhanced substrate temperature measurement apparatus, system and me...

Substrate handling and heating system

Apparatus for heating and processing a substrate

Hybrid thermal electrostatic clamp

Apparatus for improving temperature uniformity of a workpiece

Dynamic heating method and system for wafer processing

Current lead with a configuration to reduce heat load transfer in a...

Method of cooling textured workpieces with an electrostatic chuck

Techniques for improving extracted ion beam quality using high-tran...

Interfacing two insulation parts in high voltage environment

Insulator system for a terminal structure of an ion implantation sy...

Method and apparatus for controlling beam current uniformity in an...

Interfacing two insulation parts in high voltage environment

Techniques for low-temperature ion implantation

Contaminant deposition control baffle for a capacitive pressure tra...

Capacitive pressure transducer with improved electrode support

System for delivering a substantially constant vapor flow to a chem...

Pressure-based mass flow controller

Patents Applicationslast 30 patents

CYLINDRIC DECOMPOSITION FOR EFFICIENT MITIGATION OF SUBSTRATE DEFOR...

INFLUENCE FUNCTION-BASED MITIGATION OF SUBSTRATE DEFORMATION WITH F...

MITIGATION OF SADDLE DEFORMATION OF SUBSTRATES USING FILM DEPOSITIO...

OPTIMIZED FILM DEPOSITION AND ION IMPLANTATION FOR MITIGATION OF ST...

Model-Based Controlled Load Lock Pumping Scheme

Load Lock With Integrated Features

Hybrid Control System For Workpiece Heating

METHOD AND APPARATUS FOR CALIBRATION OF SUBSTRATE TEMPERATURE USING...

SYSTEM AND APPARATUS FOR ENHANCED SUBSTRATE HEATING AND RAPID SUBST...

ENHANCED SUBSTRATE TEMPERATURE MEASUREMENT APPARATUS, SYSTEM AND ME...

Substrate Handling And Heating System

Apparatus For Heating And Processing A Substrate

Hybrid Thermal Electrostatic Clamp

Apparatus For Improving Temperature Uniformity Of A Workpiece

Current Lead with a Configuration to Reduce Heat Load Transfer in a...

METHOD OF COOLING TEXTURED WORKPIECES WITH AN ELECTROSTATIC CHUCK

INTERFACING TWO INSULATION PARTS IN HIGH VOLTAGE ENVIRONMENT

METHOD AND APPARATUS FOR CONTROLLING BEAM CURRENT UNIFORMITY IN AN...

EMBOSSED ELECTROSTATIC CHUCK

INTERFACING TWO INSULATION PARTS IN HIGH VOLTAGE ENVIRONMENT

TECHNIQUES FOR LOW-TEMPERATURE ION IMPLANTATION

Insulator system for a terminal structure of an ion implantation sy...

CONTAMINANT DEPOSITION CONTROL BAFFLE FOR A CAPACITIVE PRESSURE TRA...