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Santa Clara, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Selective tungsten deposition at low temperatures
Patent number
11,967,525
Issue date
Apr 23, 2024
Applied Materials, Inc.
Yi Xu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Low-temperature plasma pre-clean for selective gap fill
Patent number
11,955,381
Issue date
Apr 9, 2024
Applied Materials, Inc.
Yi Xu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Selective tungsten deposition at low temperatures
Patent number
11,404,313
Issue date
Aug 2, 2022
Applied Materials, Inc.
Yi Xu
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
SELF FIELD-SUPPRESSION CVD TUNGSTEN (W) FILL ON PVD W LINER
Publication number
20230326791
Publication date
Oct 12, 2023
Applied Materials, Inc.
Zhimin QI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHODS FOR MINIMIZING FEATURE-TO-FEATURE GAP FILL HEIGHT VARIATIONS
Publication number
20230098561
Publication date
Mar 30, 2023
Jiajie CEN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SELECTIVE TUNGSTEN DEPOSITION AT LOW TEMPERATURES
Publication number
20220367264
Publication date
Nov 17, 2022
Applied Materials, Inc.
Yi Xu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LOW-TEMPERATURE PLASMA PRE-CLEAN FOR SELECTIVE GAP FILL
Publication number
20210398850
Publication date
Dec 23, 2021
Applied Materials, Inc.
Yi Xu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SELECTIVE TUNGSTEN DEPOSITION AT LOW TEMPERATURES
Publication number
20200335395
Publication date
Oct 22, 2020
Applied Materials, Inc.
Yi Xu
H01 - BASIC ELECTRIC ELEMENTS