Da Song

Person

Albany, NY, US

People

Patents Grantslast 30 patents

Information Patent Grant
Optical emission spectroscopy for advanced process characterization
- Patent number 12,306,044
- Issue date May 20, 2025
- Tokyo Electron Limited
- Sergey Voronin
- G01 - MEASURING TESTING
Information Patent Grant
Time-resolved OES data collection
- Patent number 12,158,374
- Issue date Dec 3, 2024
- Tokyo Electron Limited
- Sergey Voronin
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
ENDPOINT DETECTION IN DRY DEVELOPMENT OF PHOTORESIST
- Publication number 20250138429
- Publication date May 1, 2025
- TOKYO ELECTRON LIMITED
- Qi WANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METROLOGY INTEGRATED WITH VACUUM PROCESSING
- Publication number 20250112065
- Publication date Apr 3, 2025
- TOKYO ELECTRON LIMITED
- Ivan MALEEV
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
OPTICAL SENSOR FOR FILM THICKNESS MEASUREMENT
- Publication number 20240418501
- Publication date Dec 19, 2024
- TOKYO ELECTRON LIMITED
- Ivan MALEEV
- G01 - MEASURING TESTING
Information Patent Application
Advanced OES Characterization
- Publication number 20240339309
- Publication date Oct 10, 2024
- TOKYO ELECTRON LIMITED
- Sergey Voronin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for OES Data Collection and Endpoint Detection
- Publication number 20240234111
- Publication date Jul 11, 2024
- TOKYO ELECTRON LIMITED
- Sergey Voronin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Time-Resolved OES Data Collection
- Publication number 20240230409
- Publication date Jul 11, 2024
- TOKYO ELECTRON LIMITED
- Sergey Voronin
- G01 - MEASURING TESTING
Information Patent Application
Time-Resolved OES Data Collection
- Publication number 20240133742
- Publication date Apr 25, 2024
- TOKYO ELECTRON LIMITED
- Sergey Voronin
- G01 - MEASURING TESTING
Information Patent Application
Method for OES Data Collection and Endpoint Detection
- Publication number 20240136164
- Publication date Apr 25, 2024
- TOKYO ELECTRON LIMITED
- Sergey Voronin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Optical Emission Spectroscopy for Advanced Process Characterization
- Publication number 20240094056
- Publication date Mar 21, 2024
- TOKYO ELECTRON LIMITED
- Sergey Voronin
- H01 - BASIC ELECTRIC ELEMENTS

Person

Patents Grantslast 30 patents

Optical emission spectroscopy for advanced process characterization

Time-resolved OES data collection

Patents Applicationslast 30 patents

ENDPOINT DETECTION IN DRY DEVELOPMENT OF PHOTORESIST

METROLOGY INTEGRATED WITH VACUUM PROCESSING

OPTICAL SENSOR FOR FILM THICKNESS MEASUREMENT

Advanced OES Characterization

Method for OES Data Collection and Endpoint Detection

Time-Resolved OES Data Collection

Time-Resolved OES Data Collection

Method for OES Data Collection and Endpoint Detection

Optical Emission Spectroscopy for Advanced Process Characterization