Da Song

Person

Albany, NY, US

People

Patents Grantslast 30 patents

Information Patent Grant
Time-resolved OES data collection
- Patent number 12,158,374
- Issue date Dec 3, 2024
- Tokyo Electron Limited
- Sergey Voronin
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
OPTICAL SENSOR FOR FILM THICKNESS MEASUREMENT
- Publication number 20240418501
- Publication date Dec 19, 2024
- TOKYO ELECTRON LIMITED
- Ivan MALEEV
- G01 - MEASURING TESTING
Information Patent Application
Advanced OES Characterization
- Publication number 20240339309
- Publication date Oct 10, 2024
- TOKYO ELECTRON LIMITED
- Sergey Voronin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for OES Data Collection and Endpoint Detection
- Publication number 20240234111
- Publication date Jul 11, 2024
- TOKYO ELECTRON LIMITED
- Sergey Voronin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Time-Resolved OES Data Collection
- Publication number 20240230409
- Publication date Jul 11, 2024
- TOKYO ELECTRON LIMITED
- Sergey Voronin
- G01 - MEASURING TESTING
Information Patent Application
Time-Resolved OES Data Collection
- Publication number 20240133742
- Publication date Apr 25, 2024
- TOKYO ELECTRON LIMITED
- Sergey Voronin
- G01 - MEASURING TESTING
Information Patent Application
Method for OES Data Collection and Endpoint Detection
- Publication number 20240136164
- Publication date Apr 25, 2024
- TOKYO ELECTRON LIMITED
- Sergey Voronin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Optical Emission Spectroscopy for Advanced Process Characterization
- Publication number 20240094056
- Publication date Mar 21, 2024
- TOKYO ELECTRON LIMITED
- Sergey Voronin
- H01 - BASIC ELECTRIC ELEMENTS

Person

Patents Grantslast 30 patents

Time-resolved OES data collection

Patents Applicationslast 30 patents

OPTICAL SENSOR FOR FILM THICKNESS MEASUREMENT

Advanced OES Characterization

Method for OES Data Collection and Endpoint Detection

Time-Resolved OES Data Collection

Time-Resolved OES Data Collection

Method for OES Data Collection and Endpoint Detection

Optical Emission Spectroscopy for Advanced Process Characterization