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Hsinchu, TW
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last 30 patents
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Patent Grant
Particle removing assembly and method of cleaning mask for lithography
Patent number
11,698,592
Issue date
Jul 11, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Chen-Yang Lin
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Particle removing assembly and method of cleaning mask for lithography
Patent number
11,294,292
Issue date
Apr 5, 2022
Taiwan Semiconductor Manufacturing Co., Ltd
Chen-Yang Lin
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
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Patent Application
PARTICLE REMOVING ASSEMBLY AND METHOD OF CLEANING MASK FOR LITHOGRAPHY
Publication number
20230314963
Publication date
Oct 5, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Chen-Yang LIN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PARTICLE REMOVING ASSEMBLY AND METHOD OF CLEANING MASK FOR LITHOGRAPHY
Publication number
20220252993
Publication date
Aug 11, 2022
Taiwan Semiconductor Manufacturing Company, Ltd.
Chen-Yang LIN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PARTICLE REMOVING ASSEMBLY AND METHOD OF CLEANING MASK FOR LITHOGRAPHY
Publication number
20210200107
Publication date
Jul 1, 2021
Taiwan Semiconductor Manufacturing Co., Ltd.
Chen-Yang LIN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY