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Daan Maurits Slotboom
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Rhenen, NL
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Patents Grants
last 30 patents
Information
Patent Grant
Method for characterizing a manufacturing process of semiconductor...
Patent number
11,860,548
Issue date
Jan 2, 2024
ASML Netherlands B.V.
Wim Tjibbo Tel
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method for controlling a manufacturing apparatus and associated app...
Patent number
11,860,549
Issue date
Jan 2, 2024
ASML Netherlands B.V.
Wolter Siemons
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method for controlling a lithographic apparatus
Patent number
11,809,088
Issue date
Nov 7, 2023
ASML Netherlands B.V.
Hadi Yagubizade
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method and apparatus for configuring spatial dimensions of a beam d...
Patent number
11,366,396
Issue date
Jun 21, 2022
ASML Netherlands B.V.
Daan Maurits Slotboom
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Methods of controlling a patterning process, device manufacturing m...
Patent number
10,908,512
Issue date
Feb 2, 2021
ASML Netherlands B.V.
Daan Maurits Slotboom
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method and apparatus to correct for patterning process error
Patent number
10,719,011
Issue date
Jul 21, 2020
ASML Netherlands B.V.
Peter Ten Berge
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Apparatus operable to perform a measurement operation on a substrat...
Patent number
10,444,632
Issue date
Oct 15, 2019
ASML Netherlands B.V.
Daan Maurits Slotboom
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Metrology method, target and substrate
Patent number
10,254,658
Issue date
Apr 9, 2019
ASML Netherlands B.V.
Daan Maurits Slotboom
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Alignment modeling and a lithographic apparatus and exposure method...
Patent number
10,095,131
Issue date
Oct 9, 2018
ASML Netherlands B.V.
Pieter Jacob Kramer
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus, device manufacturing method and associated...
Patent number
10,025,193
Issue date
Jul 17, 2018
ASML Netherlands B.V.
Hakki Ergün Cekli
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Apparatus operable to perform a measurement operation on a substrat...
Patent number
9,989,858
Issue date
Jun 5, 2018
ASML Netherlands B.V.
Daan Maurits Slotboom
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithography system and a machine learning controller for such a lit...
Patent number
9,971,251
Issue date
May 15, 2018
ASML Netherlands B.V.
Emil Peter Schmitt-Weaver
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of operating a lithographic apparatus, device manufacturing...
Patent number
9,507,279
Issue date
Nov 29, 2016
ASML Netherlands B.V.
Emil Peter Schmitt-Weaver
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Position measurement using natural frequency vibration of a pattern
Patent number
8,477,289
Issue date
Jul 2, 2013
ASML Netherlands B.V.
Daan Maurtis Slotboom
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
8,446,564
Issue date
May 21, 2013
ASML Netherlands B.V.
Gerardus Carolus Johannus Hofmans
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
A METHOD FOR CHARACTERIZING A MANUFACTURING PROCESS OF SEMICONDUCTO...
Publication number
20240111218
Publication date
Apr 4, 2024
ASML NETHERLANDS B.V.
Wim Tjibbo TEL
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS, METROLOGY SYSTEMS, AND METHODS THEREOF
Publication number
20230341785
Publication date
Oct 26, 2023
ASML NETHERLANDS B.V.
Simon Reinald HUISMAN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
DETERMINING LITHOGRAPHIC MATCHING PERFORMANCE
Publication number
20220334503
Publication date
Oct 20, 2022
ASML NETHERLANDS B.V.
Yingchao CUI
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD FOR CONTROLLING A LITHOGRAPHIC APPARATUS
Publication number
20220334500
Publication date
Oct 20, 2022
ASML NETHERLANDS B.V.
Hadi YAGUBIZADE
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
A METHOD FOR CHARACTERIZING A MANUFACTURING PROCESS OF SEMICONDUCTO...
Publication number
20220100098
Publication date
Mar 31, 2022
ASML NETHERLANDS B.V.
Wim Tjibbo TEL
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD OF MANUFACTURING DEVICES
Publication number
20210397172
Publication date
Dec 23, 2021
ASML NETHERLANDS B.V.
Abraham SLACHTER
G05 - CONTROLLING REGULATING
Information
Patent Application
METHOD AND APPARATUS FOR CONFIGURING SPATIAL DIMENSIONS OF A BEAM D...
Publication number
20210302843
Publication date
Sep 30, 2021
ASML NETHERLANDS B.V.
Daan Maurits SLOTBOOM
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD FOR CONTROLLING A MANUFACTURING APPARATUS AND ASSOCIATED APP...
Publication number
20210247700
Publication date
Aug 12, 2021
ASML NETHERLANDS B.V.
Wolter SIEMONS
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHODS OF CONTROLLING A PATTERNING PROCESS, DEVICE MANUFACTURING M...
Publication number
20180373162
Publication date
Dec 27, 2018
Daan Maurits SLOTBOOM
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
APPARATUS OPERABLE TO PERFORM A MEASUREMENT OPERATION ON A SUBSTRAT...
Publication number
20180364582
Publication date
Dec 20, 2018
ASML, Netherlands B.V.
Daan Maurits SLOTBOOM
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD AND APPARATUS TO CORRECT FOR PATTERNING PROCESS ERROR
Publication number
20180252998
Publication date
Sep 6, 2018
ASML NETHERLANDS B.V.
Peter TEN BERGE
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND EXPOSURE METHOD
Publication number
20170108783
Publication date
Apr 20, 2017
ASML NETHERLANDS B.V.
Pieter Jacob KRAMER
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Metrology Method, Target and Substrate
Publication number
20170090302
Publication date
Mar 30, 2017
ASML NETHERLANDS B.V.
DAAN MAURITS SLOTBOOM
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
APPARATUS OPERABLE TO PERFORM A MEASUREMENT OPERATION ON A SUBSTRAT...
Publication number
20160334713
Publication date
Nov 17, 2016
ASML Netherlands B.V.
Daan Maurits SLOTBOOM
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS, DEVICE MANUFACTURING METHOD AND ASSOCIATED...
Publication number
20160334712
Publication date
Nov 17, 2016
ASML NETHERLANDS B.V.
Hakki Ergün CEKLI
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHY SYSTEM AND A MACHINE LEARNING CONTROLLER FOR SUCH A LIT...
Publication number
20160170311
Publication date
Jun 16, 2016
ASML NETHERLANDS B.V.
Emil Peter SCHMITT-WEAVER
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Method of Operating a Lithographic Apparatus, Device Manufacturing...
Publication number
20140168627
Publication date
Jun 19, 2014
ASML NETHERLANDS B.V.
Emil Peter SCHMITT-WEAVER
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD OF CALCULATING MODEL PARAMETERS OF A SUBSTRATE, A LITHOGRAPH...
Publication number
20120218533
Publication date
Aug 30, 2012
ASML NETHERLANDS B.V.
Irina LYULINA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Object Alignment Measurement Method and Apparatus
Publication number
20110013188
Publication date
Jan 20, 2011
ASML NETHERLANDS B.V.
Daan Maurits SLOTBOOM
G01 - MEASURING TESTING
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20090305151
Publication date
Dec 10, 2009
ASML NETHERLANDS B.V.
Gerardus Carolus Johannus HOFMANS
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20090296058
Publication date
Dec 3, 2009
ASML NETHERLANDS B.V.
Daan Maurtis SLOTBOOM
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY