Dae-Han Choi

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Fremont, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Apparatus for the deposition of a conformal film on a substrate and...
- Patent number 9,384,979
- Issue date Jul 5, 2016
- Lam Research Corporation
- Dae-Han Choi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Critical dimension reduction and roughness control
- Patent number 8,614,149
- Issue date Dec 24, 2013
- Lam Research Corporation
- Sangheon Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for the deposition of a conformal film on a substrate and...
- Patent number 8,357,434
- Issue date Jan 22, 2013
- Lam Research Corporation
- Dae-han Choi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Critical dimension reduction and roughness control
- Patent number 8,268,118
- Issue date Sep 18, 2012
- Lam Research Corporation
- Sangheon Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Critical dimension reduction and roughness control
- Patent number 7,695,632
- Issue date Apr 13, 2010
- Lam Research Corporation
- Sangheon Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
APPARATUS FOR THE DEPOSITION OF A CONFORMAL FILM ON A SUBSTRATE AND...
- Publication number 20130074769
- Publication date Mar 28, 2013
- LAM RESEARCH CORPORATION
- Dae-Han CHOI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CRITICAL DIMENSION REDUCTION AND ROUGHNESS CONTROL
- Publication number 20120309201
- Publication date Dec 6, 2012
- LAM RESEARCH CORPORATION
- Sangheon LEE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CRITICAL DIMENSION REDUCTION AND ROUGHNESS CONTROL
- Publication number 20100148317
- Publication date Jun 17, 2010
- LAM RESEARCH CORPORATION
- Sangheon LEE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Etch rate uniformity using the independent movement of electrode pi...
- Publication number 20060278339
- Publication date Dec 14, 2006
- Lam Research Corporation, a Delaware Corporation
- Jisoo Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Critical dimension reduction and roughness control
- Publication number 20060266478
- Publication date Nov 30, 2006
- Lam Research Corporation
- Sangheon Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...