Dae J. Lim

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Fremont, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Methods for silicon electrode assembly etch rate and etch uniformit...
- Patent number 7,442,114
- Issue date Oct 28, 2008
- Lam Research Corporation
- Tuochuan Huang
- B24 - GRINDING POLISHING
Information Patent Grant
Relative lateral motion in linear CMP
- Patent number 6,899,594
- Issue date May 31, 2005
- Lam Research Corporation
- Robert Charatan
- B24 - GRINDING POLISHING

Patents Applicationslast 30 patents

Information Patent Application
Methods for silicon electrode assembly etch rate and etch uniformit...
- Publication number 20060138081
- Publication date Jun 29, 2006
- Lam Research Corporation
- Tuochuan Huang
- B08 - CLEANING