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Dae Jin Seong
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Daejeon, KR
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Patents Grants
last 30 patents
Information
Patent Grant
Planar-type plasma diagnosis apparatus, wafer-type plasma diagnosis...
Patent number
11,867,643
Issue date
Jan 9, 2024
Korea Research Institute of Standards and Science
Hyo Chang Lee
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma generation apparatus
Patent number
11,211,231
Issue date
Dec 28, 2021
Korea Research Institute of Standards and Science
Hyo Chang Lee
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Structure for diagnosis system of reaction process
Patent number
7,830,505
Issue date
Nov 9, 2010
Korea Research Institute of Standards and Science
Sang Woo Kang
G01 - MEASURING TESTING
Information
Patent Grant
Apparatus for measuring distribution of flow rates of flowable medium
Patent number
6,687,626
Issue date
Feb 3, 2004
Korea Research Institute of Standars and Science
Dae Jin Seong
G01 - MEASURING TESTING
Patents Applications
last 30 patents
Information
Patent Application
PLANAR-TYPE PLASMA DIAGNOSIS APPARATUS, WAFER-TYPE PLASMA DIAGNOSIS...
Publication number
20210116393
Publication date
Apr 22, 2021
Korea Research Institute of Standards and Science
Hyo Chang LEE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Plasma Generation Apparatus
Publication number
20190355558
Publication date
Nov 21, 2019
Korea Research Institute of Standards and Science
Hyo Chang LEE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
GAS PERMEABILITY MEASUREMENT APPARATUS AND GAS PERMEABILITY MEASURE...
Publication number
20160274018
Publication date
Sep 22, 2016
Korea Research Institute of Standards and Science
Dae-Jin Seong
G01 - MEASURING TESTING
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
Publication number
20140148014
Publication date
May 29, 2014
Korea Research Institute of Standards and Science
ShinJae You
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Structure for diagnosis system of reaction process
Publication number
20090046285
Publication date
Feb 19, 2009
Sang Woo Kang
G01 - MEASURING TESTING
Information
Patent Application
APPARATUS FOR MONITORING ELECTRON DENSITY AND ELECTRON TEMPERATURE...
Publication number
20080000585
Publication date
Jan 3, 2008
Korea Research Institute of Standards and Science
Jung Hyung Kim
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Apparatus for measuring distribution of flow rates of flowable medium
Publication number
20020134170
Publication date
Sep 26, 2002
Dae Jin Seong
G01 - MEASURING TESTING