Dahu TANG

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Beijing, CN

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Patents Grantslast 30 patents

Information Patent Grant
Adsorption bar, vacuum aligner system, and control method of vacuum...
- Patent number 10,886,052
- Issue date Jan 5, 2021
- BOE Technology Group Co., Ltd.
- Benxiang Hou
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Tank for substrate cleaning, tank heating apparatus, tank heating m...
- Patent number 10,864,556
- Issue date Dec 15, 2020
- BOE Technology Group Co., Ltd.
- Zhiguang Guo
- F28 - HEAT EXCHANGE IN GENERAL

Patents Applicationslast 30 patents

Information Patent Application
ADSORPTION BAR, VACUUM ALIGNER SYSTEM, AND CONTROL METHOD OF VACUUM...
- Publication number 20180247750
- Publication date Aug 30, 2018
- BOE TECHNOLOGY GROUP CO., LTD.
- Benxiang HOU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TANK FOR SUBSTRATE CLEANING, TANK HEATING APPARATUS, TANK HEATING M...
- Publication number 20180193885
- Publication date Jul 12, 2018
- BOE TECHNOLOGY GROUP CO., LTD.
- Zhiguang GUO
- G02 - OPTICS