Dai KOBAYASHI

Follow

Person

Yamanashi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate support and inspection apparatus
- Patent number 11,557,494
- Issue date Jan 17, 2023
- Tokyo Electron Limited
- Masahito Kobayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Stage and inspection apparatus for inspecting electronic device
- Patent number 11,499,993
- Issue date Nov 15, 2022
- Tokyo Electron Limited
- Dai Kobayashi
- G01 - MEASURING TESTING
Information Patent Grant
Substrate mounting table and substrate inspection apparatus
- Patent number 10,663,511
- Issue date May 26, 2020
- Tokyo Electron Limited
- Dai Kobayashi
- G01 - MEASURING TESTING
Information Patent Grant
Substrate inspection apparatus and substrate temperature control me...
- Patent number 9,885,747
- Issue date Feb 6, 2018
- Tokyo Electron Limited
- Yutaka Akaike
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE SUPPORT AND INSPECTION APPARATUS
- Publication number 20210407829
- Publication date Dec 30, 2021
- TOKYO ELECTRON LIMITED
- Masahito KOBAYASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
STAGE AND INSPECTION APPARATUS
- Publication number 20210156891
- Publication date May 27, 2021
- TOKYO ELECTRON LIMITED
- Dai KOBAYASHI
- G01 - MEASURING TESTING
Information Patent Application
STAGE AND INSPECTION APPARATUS
- Publication number 20210156890
- Publication date May 27, 2021
- TOKYO ELECTRON LIMITED
- Dai KOBAYASHI
- G01 - MEASURING TESTING
Information Patent Application
Substrate Mounting Table and Substrate Inspection Apparatus
- Publication number 20190025370
- Publication date Jan 24, 2019
- TOKYO ELECTRON LIMITED
- Dai KOBAYASHI
- G01 - MEASURING TESTING
Information Patent Application
HEAT TREATMENT APPARATUS AND HEAT TREATMENT METHOD
- Publication number 20160109508
- Publication date Apr 21, 2016
- TOKYO ELECTRON LIMITED
- Yutaka AKAIKE
- G01 - MEASURING TESTING