Dai KUMAGAI

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Koshi-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate cleaning method
- Patent number 9,716,002
- Issue date Jul 25, 2017
- Tokyo Electron Limited
- Yasushi Takiguchi
- B08 - CLEANING
Information Patent Grant
Substrate cleaning apparatus, substrate cleaning method, and comput...
- Patent number 8,578,953
- Issue date Nov 12, 2013
- Tokyo Electron Limited
- Yasushi Takiguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Developing treatment apparatus and developing treatment method
- Patent number 7,766,566
- Issue date Aug 3, 2010
- Tokyo Electron Limited
- Takahiro Kitano
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE CLEANING APPARATUS, SUBSTRATE CLEANING METHOD, AND COMPUT...
- Publication number 20160314958
- Publication date Oct 27, 2016
- TOKYO ELECTRON LIMITED
- Yasushi TAKIGUCHI
- B08 - CLEANING
Information Patent Application
SUBSTRATE CLEANING APPARATUS, SUBSTRATE CLEANING METHOD, AND COMPUT...
- Publication number 20140102474
- Publication date Apr 17, 2014
- TOKYO ELECTRON LIMITED
- Yasushi TAKIGUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate cleaning apparatus, substrate cleaning method, and comput...
- Publication number 20080163899
- Publication date Jul 10, 2008
- Yasushi Takiguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Developing treatment apparatus and developing treatment method
- Publication number 20070031145
- Publication date Feb 8, 2007
- TOKYO ELECTRON LIMITED
- Takahiro Kitano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY