Dai N. Lee

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Fremont, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Method of plasma etching organic antireflective coating
- Patent number 6,617,257
- Issue date Sep 9, 2003
- Lam Research Corporation
- Tuqiang Ni
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
Method of plasma etching organic antireflective coating
- Publication number 20020182881
- Publication date Dec 5, 2002
- Tuqiang Ni
- B81 - MICRO-STRUCTURAL TECHNOLOGY