Dai UEDA

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Kyoto, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate processing liquid for etching a metal layer, substrate pr...
- Patent number 11,908,938
- Issue date Feb 20, 2024
- SCREEN Holdings Co., Ltd.
- Dai Ueda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing method and substrate processing device
- Patent number 11,897,009
- Issue date Feb 13, 2024
- SCREEN Holdings Co., Ltd.
- Dai Ueda
- B08 - CLEANING
Information Patent Grant
Substrate processing method
- Patent number 11,901,173
- Issue date Feb 13, 2024
- SCREEN Holdings Co., Ltd.
- Yukifumi Yoshida
- B08 - CLEANING
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 11,260,431
- Issue date Mar 1, 2022
- SCREEN Holdings Co., Ltd.
- Yukifumi Yoshida
- B08 - CLEANING
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 11,211,241
- Issue date Dec 28, 2021
- SCREEN Holdings Co., Ltd.
- Yukifumi Yoshida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate treating method and substrate treating apparatus
- Patent number 11,133,175
- Issue date Sep 28, 2021
- SCREEN Holdings Co., Ltd.
- Yosuke Hanawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 10,792,712
- Issue date Oct 6, 2020
- SCREEN Holdings Co., Ltd.
- Yukifumi Yoshida
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 10,619,894
- Issue date Apr 14, 2020
- SCREEN Holdings Co., Ltd.
- Hiroaki Kitagawa
- B08 - CLEANING
Information Patent Grant
Substrate treating apparatus and substrate treating method
- Patent number 10,153,181
- Issue date Dec 11, 2018
- SCREEN Holdings Co., Ltd.
- Yuta Sasaki
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE TREATING METHOD AND SUBSTRATE TREATING APPARATUS
- Publication number 20240170297
- Publication date May 23, 2024
- SCREEN Holdings Co., Ltd.
- Yosuke HANAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20220392780
- Publication date Dec 8, 2022
- SCREEN Holdings Co., Ltd.
- Yukifumi YOSHIDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD
- Publication number 20220076941
- Publication date Mar 10, 2022
- SCREEN Holdings Co., Ltd.
- Yukifumi YOSHIDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING LIQUID, SUBSTRATE PROCESSING METHOD AND SUBSTR...
- Publication number 20210288172
- Publication date Sep 16, 2021
- SCREEN Holdings Co., Ltd.
- Dai UEDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING DEVICE
- Publication number 20210016331
- Publication date Jan 21, 2021
- SCREEN Holdings Co., Ltd.
- Dai UEDA
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20200384510
- Publication date Dec 10, 2020
- SCREEN Holdings Co., Ltd.
- Yukifumi YOSHIDA
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20200194281
- Publication date Jun 18, 2020
- SCREEN Holdings Co., Ltd.
- Yukifumi YOSHIDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20190371599
- Publication date Dec 5, 2019
- SCREEN Holdings Co., Ltd.
- Yukifumi YOSHIDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20190366394
- Publication date Dec 5, 2019
- SCREEN Holdings Co., Ltd.
- Yukifumi YOSHIDA
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Application
SUBSTRATE TREATING METHOD AND SUBSTRATE TREATING APPARATUS
- Publication number 20190333755
- Publication date Oct 31, 2019
- SCREEN Holdings Co., Ltd.
- Yosuke HANAWA
- B08 - CLEANING
Information Patent Application
SUBSTRATE TREATING APPARATUS AND SUBSTRATE TREATING METHOD
- Publication number 20170345683
- Publication date Nov 30, 2017
- SCREEN Holdings Co., Ltd.
- Yuta SASAKI
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20170213725
- Publication date Jul 27, 2017
- SCREEN Holdings Co., Ltd.
- Hiroaki KITAGAWA
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...

Person

Patents Grantslast 30 patents

Substrate processing liquid for etching a metal layer, substrate pr...

Substrate processing method and substrate processing device

Substrate processing method

Substrate processing method and substrate processing apparatus

Substrate processing method and substrate processing apparatus

Substrate treating method and substrate treating apparatus

Substrate processing method and substrate processing apparatus

Substrate processing apparatus and substrate processing method

Substrate treating apparatus and substrate treating method

Patents Applicationslast 30 patents

SUBSTRATE TREATING METHOD AND SUBSTRATE TREATING APPARATUS

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING LIQUID, SUBSTRATE PROCESSING METHOD AND SUBSTR...

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING DEVICE

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE TREATING METHOD AND SUBSTRATE TREATING APPARATUS

SUBSTRATE TREATING APPARATUS AND SUBSTRATE TREATING METHOD

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD