Dai YOSHINARI

Follow

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus
- Patent number 11,541,502
- Issue date Jan 3, 2023
- Ebara Corporation
- Kuniaki Yamaguchi
- B24 - GRINDING POLISHING

Patents Applicationslast 30 patents

Information Patent Application
CLEANING AND TRANSFER EQUIPMENT, WAFER TREATMENT EQUIPMENT, TRANSFE...
- Publication number 20240379405
- Publication date Nov 14, 2024
- EBARA CORPORATION
- KOTARO TOYOSAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR POLISHING AND METHOD OF POLISHING
- Publication number 20230381916
- Publication date Nov 30, 2023
- EBARA CORPORATION
- Kuniaki YAMAGUCHI
- B24 - GRINDING POLISHING
Information Patent Application
PUSHER, TRANSFER DEVICE, AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20230226662
- Publication date Jul 20, 2023
- EBARA CORPORATION
- Kuniaki YAMAGUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20210394332
- Publication date Dec 23, 2021
- EBARA CORPORATION
- Kuniaki YAMAGUCHI
- B24 - GRINDING POLISHING