Daigo Yamada

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Kyoto, JP

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Patents Grantslast 30 patents

Information Patent Grant
Scheduling method and program for a substrate treating apparatus
- Patent number 7,801,633
- Issue date Sep 21, 2010
- Dainippon Screen Mfg. Co., Ltd.
- Masahiro Yamamoto
- G05 - CONTROLLING REGULATING

Patents Applicationslast 30 patents

Information Patent Application
SCHEDULING METHOD AND PROGRAM FOR A SUBSTRATE TREATING APPARATUS
- Publication number 20090018686
- Publication date Jan 15, 2009
- Masahiro Yamamoto
- G05 - CONTROLLING REGULATING