Daiki SHIBATA

Person

Koshi-Shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Liquid treatment apparatus and method of adjusting temperature of t...
- Patent number 11,860,542
- Issue date Jan 2, 2024
- Tokyo Electron Limited
- Takashi Yamauchi
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Liquid treatment apparatus and method of adjusting temperature of t...
- Patent number 11,561,473
- Issue date Jan 24, 2023
- Tokyo Electron Limited
- Takashi Yamauchi
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Liquid delivery method, liquid delivery system, and computer-readab...
- Patent number 10,400,760
- Issue date Sep 3, 2019
- Tokyo Electronic Limited
- Takashi Sasa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Processing liquid supplying apparatus, processing liquid supplying...
- Patent number 10,036,379
- Issue date Jul 31, 2018
- Tokyo Electron Limited
- Takashi Sasa
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE

Patents Applicationslast 30 patents

Information Patent Application
LIQUID TREATMENT APPARATUS AND METHOD OF ADJUSTING TEMPERATURE OF T...
- Publication number 20230152703
- Publication date May 18, 2023
- TOKYO ELECTRON LIMITED
- Takashi YAMAUCHI
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
LIQUID TREATMENT APPARATUS AND METHOD OF ADJUSTING TEMPERATURE OF T...
- Publication number 20210181638
- Publication date Jun 17, 2021
- TOKYO ELECTRON LIMITED
- Takashi YAMAUCHI
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
COATING METHOD, COATING APPARATUS, AND STORAGE MEDIUM
- Publication number 20210078035
- Publication date Mar 18, 2021
- TOKYO ELECTRON LIMITED
- Yusaku HASHIMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TANK, SUBSTRATE PROCESSING APPARATUS, AND METHOD OF USING THE TANK
- Publication number 20200357662
- Publication date Nov 12, 2020
- TOKYO ELECTRON LIMITED
- Tomohiko MUTA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LIQUID DELIVERY METHOD, LIQUID DELIVERY SYSTEM, AND COMPUTER-READAB...
- Publication number 20160116845
- Publication date Apr 28, 2016
- TOKYO ELECTRON LIMITED
- Takashi Sasa
- F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
Information Patent Application
PROCESSING LIQUID SUPPLYING APPARATUS, PROCESSING LIQUID SUPPLYING...
- Publication number 20150159642
- Publication date Jun 11, 2015
- TOKYO ELECTRON LIMITED
- Takashi SASA
- F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...

Daiki SHIBATA

Person

Patents Grantslast 30 patents

Liquid treatment apparatus and method of adjusting temperature of t...

Liquid treatment apparatus and method of adjusting temperature of t...

Liquid delivery method, liquid delivery system, and computer-readab...

Processing liquid supplying apparatus, processing liquid supplying...

Patents Applicationslast 30 patents

LIQUID TREATMENT APPARATUS AND METHOD OF ADJUSTING TEMPERATURE OF T...

LIQUID TREATMENT APPARATUS AND METHOD OF ADJUSTING TEMPERATURE OF T...

COATING METHOD, COATING APPARATUS, AND STORAGE MEDIUM

TANK, SUBSTRATE PROCESSING APPARATUS, AND METHOD OF USING THE TANK

LIQUID DELIVERY METHOD, LIQUID DELIVERY SYSTEM, AND COMPUTER-READAB...

PROCESSING LIQUID SUPPLYING APPARATUS, PROCESSING LIQUID SUPPLYING...