Daiki UEHARA

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Kyoto, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus
- Patent number 11,621,174
- Issue date Apr 4, 2023
- SCREEN Holdings Co., Ltd.
- Noritake Sumi
- B08 - CLEANING
Information Patent Grant
Substrate processing apparatus
- Patent number 11,587,803
- Issue date Feb 21, 2023
- SCREEN Holdings Co., Ltd.
- Noritake Sumi
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20230066729
- Publication date Mar 2, 2023
- Zhida WANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20200411336
- Publication date Dec 31, 2020
- SCREEN Holdings Co., Ltd.
- Noritake SUMI
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20200411334
- Publication date Dec 31, 2020
- SCREEN Holdings Co., Ltd.
- Noritake SUMI
- B08 - CLEANING