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Daiki Yamatani
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Shizuoka-ken, JP
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last 30 patents
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Patent Grant
Extreme ultraviolet source
Patent number
6,982,421
Issue date
Jan 3, 2006
Ushiodenki Kabushiki Kaisha
Hiroto Sato
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Patents Applications
last 30 patents
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Patent Application
EXTREME ULTRAVIOLET LIGHT SOURCE DEVICE
Publication number
20100123086
Publication date
May 20, 2010
Ushiodenki Kabushiki Kaisha
Daiki YAMATANI
G01 - MEASURING TESTING
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Patent Application
Extreme ultraviolet source
Publication number
20050151455
Publication date
Jul 14, 2005
Ushiodenki Kabushiki Kaisha
Hiroto Sato
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR