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Daimhin Paul Murphy
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San Francisco, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Substrate processing apparatus and related systems and methods
Patent number
6,846,380
Issue date
Jan 25, 2005
The BOC Group, Inc.
C. John Dickinson
B08 - CLEANING
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Patent Grant
Vacuum load lock, system including vacuum load lock, and associated...
Patent number
6,701,972
Issue date
Mar 9, 2004
The BOC Group, Inc.
Colin John Dickinson
B24 - GRINDING POLISHING
Patents Applications
last 30 patents
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Patent Application
Vacuum chamber load lock purging method and apparatus
Publication number
20040118343
Publication date
Jun 24, 2004
Frederick L. Tapp
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Substrate processing apparatus and related systems and methods
Publication number
20030232512
Publication date
Dec 18, 2003
C. John Dickinson
B08 - CLEANING
Information
Patent Application
Vacuum load lock, system including vacuum load lock, and associated...
Publication number
20030131902
Publication date
Jul 17, 2003
Colin John Dickinson
B24 - GRINDING POLISHING