Daisuke Aoki

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Kumamoto, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus
- Patent number 11,670,527
- Issue date Jun 6, 2023
- Tokyo Electron Limited
- Daisuke Aoki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 11,404,295
- Issue date Aug 2, 2022
- Tokyo Electron Limited
- Junya Minamida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 10,186,433
- Issue date Jan 22, 2019
- Tokyo Electron Limited
- Junya Minamida
- B08 - CLEANING

Patents Applicationslast 30 patents

Information Patent Application
GAS PROCESSING APPARATUS AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20220395776
- Publication date Dec 15, 2022
- TOKYO ELECTRON LIMITED
- Keisuke Tsugao
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20200219736
- Publication date Jul 9, 2020
- TOKYO ELECTRON LIMITED
- Daisuke Aoki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20190252223
- Publication date Aug 15, 2019
- TOKYO ELECTRON LIMITED
- Junya Minamida
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20160121373
- Publication date May 5, 2016
- TOKYO ELECTRON LIMITED
- Junya Minamida
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20160020122
- Publication date Jan 21, 2016
- TOKYO ELECTRON LIMITED
- Sho Watanabe
- H01 - BASIC ELECTRIC ELEMENTS