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Daisuke HIEDA
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Tokyo, JP
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last 30 patents
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Patent Grant
Susceptor, vapor deposition apparatus, vapor deposition method and...
Patent number
10,490,437
Issue date
Nov 26, 2019
Sumco Corporation
Daisuke Hieda
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
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Patent Application
METHOD FOR PRODUCING SUPPORT SUBSTRATE FOR BONDED WAFER, AND SUPPOR...
Publication number
20230395423
Publication date
Dec 7, 2023
SUMCO CORPORATION
Naoya NONAKA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUPPORT SUBSTRATE FOR BONDED WAFER
Publication number
20230230875
Publication date
Jul 20, 2023
SUMCO CORPORATION
Shota SHIBUYA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUSCEPTOR, VAPOR DEPOSITION APPARATUS, VAPOR DEPOSITION METHOD AND...
Publication number
20160300753
Publication date
Oct 13, 2016
SUMCO CORPORATION
Daisuke HIEDA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...