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Daisuke IKEMOTO
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Kikuchi-gun, JP
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last 30 patents
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Patent Grant
Coating apparatus
Patent number
9,401,291
Issue date
Jul 26, 2016
Tokyo Electron Limited
Yuji Mimura
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Patents Applications
last 30 patents
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Patent Application
COATING APPARATUS
Publication number
20150128858
Publication date
May 14, 2015
TOKYO ELECTRON LIMITED
Yuji MIMURA
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...