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Daisuke Ito
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Hillsboro, OR, US
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Patents Grants
last 30 patents
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Patent Grant
Gas phase etch with controllable etch selectivity of metals
Patent number
11,715,643
Issue date
Aug 1, 2023
Tokyo Electron Limited
Subhadeep Kal
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Non-plasma etch of titanium-containing material layers with tunable...
Patent number
11,322,350
Issue date
May 3, 2022
Tokyo Electron Limited
Daisuke Ito
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Gas phase etch with controllable etch selectivity of silicon-german...
Patent number
10,923,356
Issue date
Feb 16, 2021
Tokyo Electron Limited
Subhadeep Kal
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
NON-PLASMA ETCH OF TITANIUM-CONTAINING MATERIAL LAYERS WITH TUNABLE...
Publication number
20210057213
Publication date
Feb 25, 2021
TOKYO ELECTRON LIMITED
Daisuke Ito
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
GAS PHASE ETCH WITH CONTROLLABLE ETCH SELECTIVITY OF METALS
Publication number
20210020454
Publication date
Jan 21, 2021
TOKYO ELECTRON LIMITED
Subhadeep Kal
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
GAS PHASE ETCH WITH CONTROLLABLE ETCH SELECTIVITY OF SILICON-GERMAN...
Publication number
20200027741
Publication date
Jan 23, 2020
TOKYO ELECTRON LIMITED
Subhadeep Kal
H01 - BASIC ELECTRIC ELEMENTS