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Daisuke Kajiwara
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Koshi City, Kumamoto, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Foreign substance detection device and foreign substance detection...
Patent number
11,906,414
Issue date
Feb 20, 2024
Tokyo Electron Limited
Masato Hayashi
G01 - MEASURING TESTING
Information
Patent Grant
Foreign substance detection device and foreign substance detection...
Patent number
11,402,313
Issue date
Aug 2, 2022
Tokyo Electron Limited
Masato Hayashi
G01 - MEASURING TESTING
Information
Patent Grant
Foreign substance detection device, foreign substance detection met...
Patent number
11,048,016
Issue date
Jun 29, 2021
Tokyo Electron Limited
Masato Hayashi
G01 - MEASURING TESTING
Patents Applications
last 30 patents
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Patent Application
SUBSTRATE INSPECTION APPARATUS, SUBSTRATE INSPECTION METHOD, AND RE...
Publication number
20230224559
Publication date
Jul 13, 2023
TOKYO ELECTRON LIMITED
Daisuke Kajiwara
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
FOREIGN SUBSTANCE DETECTION DEVICE AND FOREIGN SUBSTANCE DETECTION...
Publication number
20220326133
Publication date
Oct 13, 2022
TOKYO ELECTRON LIMITED
Masato Hayashi
G01 - MEASURING TESTING
Information
Patent Application
FOREIGN SUBSTANCE DETECTION DEVICE AND FOREIGN SUBSTANCE DETECTION...
Publication number
20210190661
Publication date
Jun 24, 2021
TOKYO ELECTRON LIMITED
Masato Hayashi
G01 - MEASURING TESTING
Information
Patent Application
FOREIGN SUBSTANCE DETECTION DEVICE, FOREIGN SUBSTANCE DETECTION MET...
Publication number
20190383963
Publication date
Dec 19, 2019
TOKYO ELECTRON LIMITED
Masato Hayashi
G01 - MEASURING TESTING