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Daisuke KUDO
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Yokkaichi City, JP
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last 30 patents
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Patent Grant
Heat treatment system, heat treatment method, and program
Patent number
9,453,683
Issue date
Sep 27, 2016
Tokyo Electron Limited
Yuichi Takenaga
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
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Patent Application
HEAT TREATMENT SYSTEM, HEAT TREATMENT METHOD, AND PROGRAM
Publication number
20130260328
Publication date
Oct 3, 2013
TOKYO ELECTRON LIMITED
Yuichi TAKENAGA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...