Daisuke Kurashina

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Miyagi, JP

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Patents Applicationslast 30 patents

Information Patent Application
ANTENNA FOR INDUCTIVELY COUPLED PLASMA EXCITATION, ANTENNA UNIT FOR...
- Publication number 20220270851
- Publication date Aug 25, 2022
- TOKYO ELECTRON LIMITED
- Takehisa SAITO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING COIL
- Publication number 20220108871
- Publication date Apr 7, 2022
- TOKYO ELECTRON LIMITED
- Yohei Yamazawa
- H01 - BASIC ELECTRIC ELEMENTS