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Daisuke MATSUSHIMA
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Yokohama-shi, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Substrate treatment device
Patent number
12,005,482
Issue date
Jun 11, 2024
Shibaura Mechatronics Corporation
Kensuke Demura
B08 - CLEANING
Information
Patent Grant
Substrate treatment device
Patent number
11,784,040
Issue date
Oct 10, 2023
Shibaura Mechatronics Corporation
Kensuke Demura
B08 - CLEANING
Information
Patent Grant
Reflective mask cleaning apparatus and reflective mask cleaning method
Patent number
11,609,491
Issue date
Mar 21, 2023
Shibaura Mechatronics Corporation
Daisuke Matsushima
B08 - CLEANING
Information
Patent Grant
Substrate treatment device and substrate treatment method
Patent number
11,355,337
Issue date
Jun 7, 2022
Shibaura Mechatronics Corporation
Masaya Kamiya
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Imprint template manufacturing apparatus and imprint template manuf...
Patent number
10,773,425
Issue date
Sep 15, 2020
Shibaura Mechatronics Corporation
Kensuke Demura
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Grant
Substrate treatment device and substrate treatment method
Patent number
10,734,217
Issue date
Aug 4, 2020
Shibaura Mechatronics Corporation
Masaya Kamiya
B08 - CLEANING
Information
Patent Grant
Imprint template treatment apparatus
Patent number
10,668,496
Issue date
Jun 2, 2020
Shibaura Mechatronics Corporation
Satoshi Nakamura
B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information
Patent Grant
Bonding apparatus and method for manufacturing bonded substrate
Patent number
9,586,391
Issue date
Mar 7, 2017
Shibaura Mechatronics Corporation
Konosuke Hayashi
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Patents Applications
last 30 patents
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS
Publication number
20220080468
Publication date
Mar 17, 2022
SHIBAURA MECHATRONICS CORPORATION
Kensuke DEMURA
B08 - CLEANING
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
Publication number
20220068671
Publication date
Mar 3, 2022
SHIBAURA MECHATRONICS CORPORATION
Kensuke DEMURA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE TREATMENT DEVICE
Publication number
20210323036
Publication date
Oct 21, 2021
SHIBAURA MECHATRONICS CORPORATION
Daisuke MATSUSHIMA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE TREATMENT DEVICE
Publication number
20210299713
Publication date
Sep 30, 2021
SHIBAURA MECHATRONICS CORPORATION
Kensuke DEMURA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE TREATMENT DEVICE
Publication number
20210276055
Publication date
Sep 9, 2021
SHIBAURA MECHATRONICS CORPORATION
Minami NAKAMURA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE TREATMENT DEVICE
Publication number
20210265159
Publication date
Aug 26, 2021
SHIBAURA MECHATRONICS CORPORATION
Kensuke DEMURA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE TREATMENT DEVICE AND SUBSTRATE TREATMENT METHOD
Publication number
20200335324
Publication date
Oct 22, 2020
SHIBAURA MECHATRONICS CORPORATION
Masaya Kamiya
B08 - CLEANING
Information
Patent Application
REFLECTIVE MASK CLEANING APPARATUS AND REFLECTIVE MASK CLEANING METHOD
Publication number
20200124960
Publication date
Apr 23, 2020
SHIBAURA MECHATRONICS CORPORATION
Daisuke Matsushima
B08 - CLEANING
Information
Patent Application
IMPRINT TEMPLATE MANUFACTURING APPARATUS AND IMPRINT TEMPLATE MANUF...
Publication number
20180117795
Publication date
May 3, 2018
SHIBAURA MECHATRONICS CORPORATION
Kensuke Demura
B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information
Patent Application
IMPRINT TEMPLATE MANUFACTURING APPARATUS AND IMPRINT TEMPLATE MANUF...
Publication number
20180117796
Publication date
May 3, 2018
SHIBAURA MECHATRONICS CORPORATION
Kensuke Demura
B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information
Patent Application
SUBSTRATE TREATMENT DEVICE AND SUBSTRATE TREATMENT METHOD
Publication number
20180047559
Publication date
Feb 15, 2018
SHIBAURA MECHATRONICS CORPORATION
Masaya Kamiya
B08 - CLEANING
Information
Patent Application
TEMPLATE FOR IMPRINT
Publication number
20180022016
Publication date
Jan 25, 2018
SHIBAURA MECHATRONICS CORPORATION
Satoshi NAKAMURA
B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information
Patent Application
IMPRINT TEMPLATE MANUFACTURING APPARATUS
Publication number
20180016673
Publication date
Jan 18, 2018
SHIBAURA MECHATRONICS CORPORATION
Satoshi NAKAMURA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
IMPRINT TEMPLATE MANUFACTURING APPARATUS
Publication number
20180015497
Publication date
Jan 18, 2018
SHIBAURA MECHATRONICS CORPORATION
Satoshi Nakamura
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Application
REFLECTIVE MASK CLEANING APPARATUS AND REFLECTIVE MASK CLEANING METHOD
Publication number
20170017151
Publication date
Jan 19, 2017
SHIBAURA MECHATRONICS CORPORATION
Daisuke Matsushima
B08 - CLEANING
Information
Patent Application
Bonding Apparatus and Method for Manufacturing Bonded Substrate
Publication number
20160009070
Publication date
Jan 14, 2016
SHIBAURA MECHATRONICS CORPORATION
Konosuke Hayashi
B32 - LAYERED PRODUCTS
Information
Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
Publication number
20120192953
Publication date
Aug 2, 2012
SHIBAURA MECHATRONICS CORPORATION
Daisuke Matsushima
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
PLASMA ETCHING APPARATUS AND PLASMA ETCHING METHOD
Publication number
20120132617
Publication date
May 31, 2012
SHIBAURA MECHATRONICS CORPORATION
Daisuke MATSUSHIMA
H01 - BASIC ELECTRIC ELEMENTS