Daisuke MORISAWA

Person

Nirasaki-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Method of processing target substrate
- Patent number 11,101,154
- Issue date Aug 24, 2021
- Tokyo Electron Limited
- Daisuke Morisawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 10,186,422
- Issue date Jan 22, 2019
- Tokyo Electron Limited
- Naohide Ito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing system
- Patent number 9,845,531
- Issue date Dec 19, 2017
- Tokyo Electron Limited
- Daisuke Morisawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Processing apparatus and processing method
- Patent number 9,828,675
- Issue date Nov 28, 2017
- Tokyo Electron Limited
- Naohide Ito
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing system and substrate transfer control method
- Patent number 9,646,864
- Issue date May 9, 2017
- Tokyo Electron Limited
- Daisuke Morisawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, program, storage medium and conditi...
- Patent number 8,255,072
- Issue date Aug 28, 2012
- Tokyo Electron Limited
- Daisuke Morisawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Control device of substrate processing apparatus and control progra...
- Patent number 7,987,012
- Issue date Jul 26, 2011
- Tokyo Electron Limited
- Daisuke Morisawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus, history information recording metho...
- Patent number 7,266,418
- Issue date Sep 4, 2007
- Tokyo Electron Limited
- Youichi Nakayama
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METHOD OF PROCESSING TARGET SUBSTRATE
- Publication number 20190109030
- Publication date Apr 11, 2019
- TOKYO ELECTRON LIMITED
- Daisuke MORISAWA
- G05 - CONTROLLING REGULATING
Information Patent Application
SUBSTRATE PROCESSING SYSTEM
- Publication number 20160307784
- Publication date Oct 20, 2016
- TOKYO ELECTRON LIMITED
- Satoshi GOMI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESSING APPARATUS AND PROCESSING METHOD
- Publication number 20160093520
- Publication date Mar 31, 2016
- TOKYO ELECTRON LIMITED
- Naohide ITO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING SYSTEM
- Publication number 20150040828
- Publication date Feb 12, 2015
- TOKYO ELECTRON LIMITED
- Daisuke MORISAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE TRANSFER CONTROL METHOD
- Publication number 20140112743
- Publication date Apr 24, 2014
- TOKYO ELECTRON LIMITED
- Daisuke MORISAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20140109833
- Publication date Apr 24, 2014
- TOKYO ELECTRON LIMITED
- Naohide ITO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, PROGRAM, STORAGE MEDIUM AND CONDITI...
- Publication number 20090143890
- Publication date Jun 4, 2009
- TOKYO ELECTRON LIMITED
- Daisuke MORISAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CONTROL DEVICE OF SUBSTRATE PROCESSING APPARATUS AND CONTROL PROGRA...
- Publication number 20080306615
- Publication date Dec 11, 2008
- TOKYO ELECTRON LIMITED
- Daisuke MORISAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate processing apparatus, history information recording metho...
- Publication number 20060224265
- Publication date Oct 5, 2006
- TOKYO ELECTRON LIMITED
- Youichi Nakayama
- H01 - BASIC ELECTRIC ELEMENTS

Daisuke MORISAWA

Person

Patents Grantslast 30 patents

Method of processing target substrate

Substrate processing apparatus

Substrate processing system

Processing apparatus and processing method

Substrate processing system and substrate transfer control method

Substrate processing apparatus, program, storage medium and conditi...

Control device of substrate processing apparatus and control progra...

Substrate processing apparatus, history information recording metho...

Patents Applicationslast 30 patents

METHOD OF PROCESSING TARGET SUBSTRATE

SUBSTRATE PROCESSING SYSTEM

PROCESSING APPARATUS AND PROCESSING METHOD

SUBSTRATE PROCESSING SYSTEM

SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE TRANSFER CONTROL METHOD

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS, PROGRAM, STORAGE MEDIUM AND CONDITI...

CONTROL DEVICE OF SUBSTRATE PROCESSING APPARATUS AND CONTROL PROGRA...

Substrate processing apparatus, history information recording metho...