Daisuke Nozu

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Atsu-Shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Method for cleaning reaction container and film deposition system
- Patent number 7,546,840
- Issue date Jun 16, 2009
- Tokyo Electron Limited
- Kazuhide Hasebe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
Method for cleaning reaction container and film deposition system
- Publication number 20040144320
- Publication date Jul 29, 2004
- Kazuhide Hasebe
- B08 - CLEANING