Daisuke Saiki

Person

Koshi City, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 12,170,209
- Issue date Dec 17, 2024
- Tokyo Electron Limited
- Takashi Yabuta
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 11,908,680
- Issue date Feb 20, 2024
- Tokyo Electron Limited
- Akira Fujita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Liquid processing apparatus, liquid processing method, and storage...
- Patent number 10,236,192
- Issue date Mar 19, 2019
- Tokyo Electron Limited
- Jun Nonaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate liquid processing apparatus and method, and computer-read...
- Patent number 9,862,007
- Issue date Jan 9, 2018
- Tokyo Electron Limited
- Daisuke Saiki
- B24 - GRINDING POLISHING
Information Patent Grant
Liquid processing apparatus
- Patent number 9,192,878
- Issue date Nov 24, 2015
- Tokyo Electron Limited
- Shogo Mizota
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20240238848
- Publication date Jul 18, 2024
- TOKYO ELECTRON LIMITED
- Takafumi KINOSHITA
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20240153756
- Publication date May 9, 2024
- TOKYO ELECTRON LIMITED
- Akira Fujita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20220199400
- Publication date Jun 23, 2022
- TOKYO ELECTRON LIMITED
- Akira Fujita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20220037167
- Publication date Feb 3, 2022
- TOKYO ELECTRON LIMITED
- Takashi YABUTA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE LIQUID PROCESSING APPARATUS AND METHOD, AND COMPUTER-READ...
- Publication number 20150273538
- Publication date Oct 1, 2015
- TOKYO ELECTRON LIMITED
- Daisuke Saiki
- B08 - CLEANING
Information Patent Application
LIQUID PROCESSING APPARATUS, LIQUID PROCESSING METHOD, AND STORAGE...
- Publication number 20150147888
- Publication date May 28, 2015
- TOKYO ELECTRON LIMITED
- Jun Nonaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LIQUID PROCESSING METHOD, LIQUID PROCESSING APPARATUS AND STORAGE M...
- Publication number 20140377463
- Publication date Dec 25, 2014
- Yosuke Hachiya
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
LIQUID PROCESSING APPARATUS
- Publication number 20140182455
- Publication date Jul 3, 2014
- TOKYO ELECTRON LIMITED
- Shogo Mizota
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL

Daisuke Saiki

Person

Patents Grantslast 30 patents

Substrate processing apparatus and substrate processing method

Substrate processing method and substrate processing apparatus

Liquid processing apparatus, liquid processing method, and storage...

Substrate liquid processing apparatus and method, and computer-read...

Liquid processing apparatus

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE LIQUID PROCESSING APPARATUS AND METHOD, AND COMPUTER-READ...

LIQUID PROCESSING APPARATUS, LIQUID PROCESSING METHOD, AND STORAGE...

LIQUID PROCESSING METHOD, LIQUID PROCESSING APPARATUS AND STORAGE M...

LIQUID PROCESSING APPARATUS