Daisuke SATAKE

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Miyagi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Placement stage and substrate processing apparatus
- Patent number 12,300,530
- Issue date May 13, 2025
- Tokyo Electron Limited
- Daisuke Satake
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and electrostatic chuck
- Patent number 12,217,943
- Issue date Feb 4, 2025
- Tokyo Electron Limited
- Kohei Otsuki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Stage and substrate processing apparatus
- Patent number 11,728,145
- Issue date Aug 15, 2023
- Tokyo Electron Limited
- Daisuke Satake
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND ELECTROSTATIC CHUCK
- Publication number 20250087469
- Publication date Mar 13, 2025
- TOKYO ELECTRON LIMITED
- Kohei OTSUKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND ELECTROSTATIC CHUCK
- Publication number 20220406576
- Publication date Dec 22, 2022
- TOKYO ELECTRON LIMITED
- Kohei OTSUKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
STAGE, SUBSTRATE PROCESSING APPARATUS, AND HEAT TRANSFER GAS SUPPLY...
- Publication number 20210202219
- Publication date Jul 1, 2021
- TOKYO ELECTRON LIMITED
- Daisuke SATAKE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLACEMENT STAGE AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20210043489
- Publication date Feb 11, 2021
- TOKYO ELECTRON LIMITED
- Daisuke SATAKE
- H01 - BASIC ELECTRIC ELEMENTS