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Daisuke Tajima
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Chiba-ken, JP
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last 30 patents
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Patent Grant
Plasma processing of tungsten using a gas mixture comprising a fluo...
Patent number
6,277,763
Issue date
Aug 21, 2001
Applied Materials, Inc.
Katsuhisa Kugimiya
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Grant
Plasma process for etching multicomponent alloys
Patent number
5,779,926
Issue date
Jul 14, 1998
Applied Materials, Inc.
Diana Xiaobing Ma
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...