Daisuke TAMURA

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Miyagi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Method of reducing leakage of heat transfer gas and plasma processi...
- Patent number 12,142,462
- Issue date Nov 12, 2024
- Tokyo Electron Limited
- Shinsuke Oka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Etching method
- Patent number 9,786,512
- Issue date Oct 10, 2017
- Tokyo Electron Limited
- Yu Nagatomo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing semiconductor device
- Patent number 9,230,824
- Issue date Jan 5, 2016
- Tokyo Electron Limited
- Wataru Takayama
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METHOD OF REDUCING LEAKAGE OF HEAT TRANSFER GAS AND PLASMA PROCESSI...
- Publication number 20240274412
- Publication date Aug 15, 2024
- TOKYO ELECTRON LIMITED
- Shinsuke OKA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ETCHING METHOD
- Publication number 20160293440
- Publication date Oct 6, 2016
- TOKYO ELECTRON LIMITED
- Yu NAGATOMO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
- Publication number 20150179466
- Publication date Jun 25, 2015
- TOKYO ELECTRON LIMITED
- Wataru TAKAYAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA NITRIDING METHOD AND PLASMA NITRIDING APPARATUS
- Publication number 20130017690
- Publication date Jan 17, 2013
- TOKYO ELECTRON LIMITED
- Koichi Takatsuki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MICROWAVE PLASMA PROCESSING APPARATUS, MICROWAVE PLASMA PROCESSING...
- Publication number 20100240225
- Publication date Sep 23, 2010
- TOKYO ELECTRON LIMITED
- Yoshihiro Sato
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR