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Daisuke Terauchi
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Hitachinaka, JP
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Patents Grants
last 30 patents
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Patent Grant
Charged particle beam equipment with magnification correction
Patent number
7,649,172
Issue date
Jan 19, 2010
Hitachi High-Technologies Corporation
Masaru Ozawa
G06 - COMPUTING CALCULATING COUNTING
Patents Applications
last 30 patents
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Patent Application
Charged particle beam equipment
Publication number
20080067380
Publication date
Mar 20, 2008
Hitachi High-Technologies Corporation
Masaru Ozawa
G06 - COMPUTING CALCULATING COUNTING