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Daisuke Toriya

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Patents Grantslast 30 patents

  • Information Patent Grant

    Film-forming apparatus
    • Patent number 11,466,365
    • Issue date Oct 11, 2022
    • Tokyo Electron Limited
    • Daisuke Toriya
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Method of controlling substrate processing apparatus, and substrate...
    • Patent number 11,441,224
    • Issue date Sep 13, 2022
    • Tokyo Electron Limited
    • Daisuke Toriya
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Substrate holder and film forming apparatus
    • Patent number 11,396,704
    • Issue date Jul 26, 2022
    • Tokyo Electron Limited
    • Toshiaki Fujisato
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Placement apparatus and processing apparatus
    • Patent number 11,280,002
    • Issue date Mar 22, 2022
    • Tokyo Electron Limited
    • Kohichi Satoh
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Substrate stage and substrate processing apparatus
    • Patent number 11,281,116
    • Issue date Mar 22, 2022
    • Tokyo Electron Limited
    • Einosuke Tsuda
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Grant

    Film forming apparatus
    • Patent number 10,526,702
    • Issue date Jan 7, 2020
    • Tokyo Electron Limited
    • Daisuke Toriya
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Film formation device
    • Patent number 10,221,478
    • Issue date Mar 5, 2019
    • Tokyo Electron Limited
    • Kensaku Narushima
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Gas treatment apparatus and gas treatment method
    • Patent number 10,156,014
    • Issue date Dec 18, 2018
    • Tokyo Electron Limited
    • Takashi Kakegawa
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Film forming apparatus
    • Patent number 10,094,019
    • Issue date Oct 9, 2018
    • Tokyo Electron Limited
    • Daisuke Toriya
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Mounting table structure, and processing apparatus
    • Patent number 8,334,481
    • Issue date Dec 18, 2012
    • Tokyo Electron Limited
    • Tomohito Komatsu
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Processing device and method of maintaining the device
    • Patent number 7,367,350
    • Issue date May 6, 2008
    • Tokyo Electron Limited
    • Daisuke Toriya
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

  • Information Patent Application

    SUBSTRATE STAGE AND SUBSTRATE PROCESSING APPARATUS
    • Publication number 20210302846
    • Publication date Sep 30, 2021
    • TOKYO ELECTRON LIMITED
    • Einosuke TSUDA
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    PROCESSING APPARATUS
    • Publication number 20210005493
    • Publication date Jan 7, 2021
    • TOKYO ELECTRON LIMITED
    • Toshiaki FUJISATO
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Method of Controlling Substrate Processing Apparatus, and Substrate...
    • Publication number 20200248306
    • Publication date Aug 6, 2020
    • TOKYO ELECTRON LIMITED
    • Daisuke TORIYA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Substrate Holder and Film Forming Apparatus
    • Publication number 20200165723
    • Publication date May 28, 2020
    • TOKYO ELECTRON LIMITED
    • Toshiaki FUJISATO
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Placement Apparatus and Processing Apparatus
    • Publication number 20200095680
    • Publication date Mar 26, 2020
    • TOKYO ELECTRON LIMITED
    • Kohichi SATOH
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    FILM-FORMING APPARATUS
    • Publication number 20200010956
    • Publication date Jan 9, 2020
    • TOKYO ELECTRON LIMITED
    • Daisuke TORIYA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    GAS TREATMENT APPARATUS AND GAS TREATMENT METHOD
    • Publication number 20180171478
    • Publication date Jun 21, 2018
    • TOKYO ELECTRON LIMITED
    • Takashi KAKEGAWA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Film Forming Apparatus
    • Publication number 20160355928
    • Publication date Dec 8, 2016
    • TOKYO ELECTRON LIMITED
    • Daisuke TORIYA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Film Formation Device
    • Publication number 20160083837
    • Publication date Mar 24, 2016
    • TOKYO ELECTRON LIMITED
    • Kensaku NARUSHIMA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    FILM FORMING APPARATUS
    • Publication number 20140130743
    • Publication date May 15, 2014
    • TOKYO ELECTRON LIMITED
    • Daisuke TORIYA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    STAGE STRUCTURE AND HEAT TREATMENT APPARATUS
    • Publication number 20100323313
    • Publication date Dec 23, 2010
    • TOKYO ELECRON LIMITED
    • Daisuke Toriya
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    MOUNTING TABLE STRUCTURE, AND PROCESSING APPARATUS
    • Publication number 20090277895
    • Publication date Nov 12, 2009
    • TOKYO ELECTRON LIMITED
    • Tomohito KOMATSU
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Processing device and method of maintaining the device
    • Publication number 20050115501
    • Publication date Jun 2, 2005
    • Daisuke Toriya
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...