Daisuke YOSHIKOSHI

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Miyagi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Radical deactivation component, plasma processing apparatus using t...
- Patent number 11,380,522
- Issue date Jul 5, 2022
- Tokyo Electron Limited
- Koji Yamagishi
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL

Patents Applicationslast 30 patents

Information Patent Application
FILM FORMING APPARATUS AND FILM FORMING METHOD
- Publication number 20210130955
- Publication date May 6, 2021
- TOKYO ELECTRON LIMITED
- Hiroshi NAGAIKE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RADICAL DEACTIVATION COMPONENT, PLASMA PROCESSING APPARATUS USING T...
- Publication number 20190362939
- Publication date Nov 28, 2019
- TOKYO ELECTRON LIMITED
- Koji YAMAGISHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...