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Dajana Cujas
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Seeheim-Jugenheim, DE
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last 30 patents
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Patent Grant
Scanning particle microscope and method for determining a position...
Patent number
9,336,983
Issue date
May 10, 2016
Carl Zeiss SMT GmbH
Michael Budach
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
SCANNING PARTICLE MICROSCOPE AND METHOD FOR DETERMINING A POSITION...
Publication number
20150380210
Publication date
Dec 31, 2015
CARL ZEISS SMS GMBH
Michael Budach
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
METHOD AND APPARATUS FOR PROTECTING A SUBSTRATE DURING PROCESSING B...
Publication number
20140255831
Publication date
Sep 11, 2014
Thorsten Hofmann
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY