Dale A. Harrison

Person

Gilbert, AZ, US

People

Patents Grantslast 30 patents

Information Patent Grant
Vacuum ultraviolet absorption spectroscopy system and method
- Patent number 10,677,767
- Issue date Jun 9, 2020
- VUV Analytics, Inc.
- Dale A. Harrison
- G01 - MEASURING TESTING
Information Patent Grant
Vacuum ultraviolet absorption spectroscopy system and method
- Patent number 10,641,749
- Issue date May 5, 2020
- VUV Analytics, Inc.
- Dale A. Harrison
- G01 - MEASURING TESTING
Information Patent Grant
Vacuum ultraviolet absorption spectroscopy system and method
- Patent number 10,338,040
- Issue date Jul 2, 2019
- VUV Analytics, Inc.
- Dale A. Harrison
- G01 - MEASURING TESTING
Information Patent Grant
Method for detailed and bulk classification analysis of complex sam...
- Patent number 10,302,607
- Issue date May 28, 2019
- VUV Analytics, Inc.
- Phillip Walsh
- G01 - MEASURING TESTING
Information Patent Grant
Vacuum ultraviolet absorption spectroscopy system and method
- Patent number 9,976,996
- Issue date May 22, 2018
- VUV Analytics, Inc.
- Dale A. Harrison
- G01 - MEASURING TESTING
Information Patent Grant
Vacuum ultraviolet absorption spectroscopy system and method
- Patent number 9,891,197
- Issue date Feb 13, 2018
- VUV Analytics, Inc.
- Dale A. Harrison
- G01 - MEASURING TESTING
Information Patent Grant
Vacuum ultraviolet absorption spectroscopy system and method
- Patent number 9,696,286
- Issue date Jul 4, 2017
- VUV Analytics, Inc.
- Dale A. Harrison
- G01 - MEASURING TESTING
Information Patent Grant
Vacuum ultraviolet absorption spectroscopy system and method
- Patent number 9,465,015
- Issue date Oct 11, 2016
- VUV Analytics, Inc.
- Dale A. Harrison
- G01 - MEASURING TESTING
Information Patent Grant
Methods and apparatus for vacuum ultraviolet (VUV) or shorter wavel...
- Patent number 9,310,292
- Issue date Apr 12, 2016
- VUV Analytics, Inc.
- Phillip Walsh
- G01 - MEASURING TESTING
Information Patent Grant
Vacuum ultraviolet absorption spectroscopy system and method
- Patent number 9,116,158
- Issue date Aug 25, 2015
- VUV Analytics, Inc.
- Dale A. Harrison
- G01 - MEASURING TESTING
Information Patent Grant
Optical vacuum ultra-violet wavelength nanoimprint metrology
- Patent number 8,867,041
- Issue date Oct 21, 2014
- Jordan Valley Semiconductor Ltd
- Phillip Walsh
- G01 - MEASURING TESTING
Information Patent Grant
Polarization device for vacuum ultraviolet or shorter wavelengths
- Patent number 8,867,130
- Issue date Oct 21, 2014
- VUV Analytics, Inc.
- Dale A. Harrison
- G02 - OPTICS
Information Patent Grant
Methods and apparatus for vacuum ultraviolet (VUV) or shorter wavel...
- Patent number 8,773,662
- Issue date Jul 8, 2014
- VUV Analytics, Inc.
- Phillip Walsh
- G01 - MEASURING TESTING
Information Patent Grant
Method and system for using reflectometry below deep ultra-violet (...
- Patent number 8,564,780
- Issue date Oct 22, 2013
- Jordan Valley Semiconductors Ltd.
- Phillip Walsh
- G01 - MEASURING TESTING
Information Patent Grant
Automated calibration methodology for VUV metrology system
- Patent number 8,153,987
- Issue date Apr 10, 2012
- Jordan Valley Semiconductors Ltd.
- Jeffrey B. Hurst
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for accurate calibration of VUV reflectometer
- Patent number 8,119,991
- Issue date Feb 21, 2012
- Jordan Valley Semiconductors Ltd.
- Dale A. Harrison
- G01 - MEASURING TESTING
Information Patent Grant
Broad band referencing reflectometer
- Patent number 8,054,453
- Issue date Nov 8, 2011
- Jordan Valley Semiconductors Ltd.
- Dale A. Harrison
- G01 - MEASURING TESTING
Information Patent Grant
Broad band referencing reflectometer
- Patent number 8,014,000
- Issue date Sep 6, 2011
- Jordan Valley Semiconductors Ltd.
- Dale A. Harrison
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for accurate calibration of VUV reflectometer
- Patent number 7,804,059
- Issue date Sep 28, 2010
- Jordan Valley Semiconductors Ltd.
- Dale A. Harrison
- G01 - MEASURING TESTING
Information Patent Grant
Spectrometer with collimated input light
- Patent number 7,684,037
- Issue date Mar 23, 2010
- MetroSol, Inc.
- Dale A. Harrison
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for accurate calibration of a reflectometer by...
- Patent number 7,663,097
- Issue date Feb 16, 2010
- MetroSol, Inc.
- Phillip Walsh
- G01 - MEASURING TESTING
Information Patent Grant
Contamination monitoring and control techniques for use with an opt...
- Patent number 7,663,747
- Issue date Feb 16, 2010
- MetroSol, Inc.
- Dale A. Harrison
- G01 - MEASURING TESTING
Information Patent Grant
Contamination monitoring and control techniques for use with an opt...
- Patent number 7,622,310
- Issue date Nov 24, 2009
- MetroSol, Inc.
- Dale A. Harrison
- G01 - MEASURING TESTING
Information Patent Grant
Spectrometer with moveable detector element
- Patent number 7,579,601
- Issue date Aug 25, 2009
- MetroSol, Inc.
- Dale A. Harrison
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for accurate calibration of a reflectometer by...
- Patent number 7,511,265
- Issue date Mar 31, 2009
- MetroSol, Inc.
- Phillip Walsh
- G01 - MEASURING TESTING
Information Patent Grant
Prism spectrometer
- Patent number 7,485,869
- Issue date Feb 3, 2009
- MetroSol, Inc.
- Dale A. Harrison
- G01 - MEASURING TESTING
Information Patent Grant
Vacuum ultra-violet reflectometer with stray light correction
- Patent number 7,446,876
- Issue date Nov 4, 2008
- MetroSol Inc.
- Dale A. Harrison
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for performing highly accurate thin film measu...
- Patent number 7,399,975
- Issue date Jul 15, 2008
- MetroSol, Inc.
- Dale A. Harrison
- G01 - MEASURING TESTING
Information Patent Grant
Vacuum ultraviolet referencing reflectometer
- Patent number 7,394,551
- Issue date Jul 1, 2008
- MetroSol, Inc.
- Dale A. Harrison
- G01 - MEASURING TESTING
Information Patent Grant
Broad band referencing reflectometer
- Patent number 7,391,030
- Issue date Jun 24, 2008
- MetroSol, Inc.
- Dale A. Harrison
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
Vacuum Ultraviolet Absorption Spectroscopy System And Method
- Publication number 20190376938
- Publication date Dec 12, 2019
- VUV Analytics, Inc.
- Dale A. Harrison
- G01 - MEASURING TESTING
Information Patent Application
Vacuum Ultraviolet Absorption Spectroscopy System And Method
- Publication number 20190293614
- Publication date Sep 26, 2019
- VUV Analytics, Inc.
- Dale A. Harrison
- G01 - MEASURING TESTING
Information Patent Application
Vacuum Ultraviolet Absorption Spectroscopy System And Method
- Publication number 20170030828
- Publication date Feb 2, 2017
- VUV Analytics, Inc.
- Dale A. Harrison
- G01 - MEASURING TESTING
Information Patent Application
Vacuum Ultraviolet Absorption Spectroscopy System And Method
- Publication number 20170030874
- Publication date Feb 2, 2017
- VUV Analytics, Inc.
- Dale A. Harrison
- G01 - MEASURING TESTING
Information Patent Application
Vacuum Ultraviolet Absorption Spectroscopy System And Method
- Publication number 20160377531
- Publication date Dec 29, 2016
- VUV Analytics, Inc.
- Dale A. Harrison
- G01 - MEASURING TESTING
Information Patent Application
Vacuum Ultraviolet Absorption Spectroscopy System And Method
- Publication number 20160377581
- Publication date Dec 29, 2016
- VUV Analytics, Inc.
- Dale A. Harrison
- G01 - MEASURING TESTING
Information Patent Application
Method For Detailed And Bulk Classification Analysis Of Complex Sam...
- Publication number 20160363569
- Publication date Dec 15, 2016
- VUV Analytics, Inc.
- Phillip Walsh
- G01 - MEASURING TESTING
Information Patent Application
Vacuum Ultraviolet Absorption Spectroscopy System And Method
- Publication number 20150059440
- Publication date Mar 5, 2015
- VUV Analytics, Inc.
- Dale A. Harrison
- G01 - MEASURING TESTING
Information Patent Application
Methods And Apparatus For Vacuum Ultraviolet (VUV) Or Shorter Wavel...
- Publication number 20140264053
- Publication date Sep 18, 2014
- Phillip Walsh
- G01 - MEASURING TESTING
Information Patent Application
Vacuum Ultraviolet Absorption Spectroscopy System And Method
- Publication number 20140192343
- Publication date Jul 10, 2014
- VUV ANALYTICS, INC.
- Dale A. Harrison
- G01 - MEASURING TESTING
Information Patent Application
METHODS AND APPARATUS FOR VACUUM ULTRAVIOLET (VUV) OR SHORTER WAVEL...
- Publication number 20120268740
- Publication date Oct 25, 2012
- Phillip Walsh
- G01 - MEASURING TESTING
Information Patent Application
Optical Vacuum Ultra-Violet Wavelength Nanoimprint Metrology
- Publication number 20120182542
- Publication date Jul 19, 2012
- JORDAN VALLEY SEMICONDUCTORS LTD.
- Phillip Walsh
- G01 - MEASURING TESTING
Information Patent Application
BROAD BAND REFERENCING REFLECTOMETER
- Publication number 20100328648
- Publication date Dec 30, 2010
- JORDAN VALLEY SEMICONDUCTORS LTD.
- Dale A. Harrison
- G01 - MEASURING TESTING
Information Patent Application
Method and Apparatus for Accurate Calibration of VUV Reflectometer
- Publication number 20100301225
- Publication date Dec 2, 2010
- JORDAN VALLEY SEMICONDUCTORS LTD.
- Dale A. Harrison
- G01 - MEASURING TESTING
Information Patent Application
Automated calibration methodology for VUV metrology system
- Publication number 20100294922
- Publication date Nov 25, 2010
- JEFFREY B. HURST
- G01 - MEASURING TESTING
Information Patent Application
Method and System for Using Reflectometry Below Deep Ultra-Violet (...
- Publication number 20100290033
- Publication date Nov 18, 2010
- JORDAN VALLEY SEMICONDUCTORS LTD.
- Phillip Walsh
- G01 - MEASURING TESTING
Information Patent Application
COMBINED OPTICAL METROLOGY TECHNIQUES
- Publication number 20100277741
- Publication date Nov 4, 2010
- JORDAN VALLEY SEMICONDUCTORS LTD.
- Phillip Walsh
- G01 - MEASURING TESTING
Information Patent Application
Broad band referencing reflectometer
- Publication number 20100051822
- Publication date Mar 4, 2010
- MetroSol, Inc.
- Dale A. Harrison
- G01 - MEASURING TESTING
Information Patent Application
CONTAMINATION MONITORING AND CONTROL TECHNIQUES FOR USE WITH AN OPT...
- Publication number 20100000569
- Publication date Jan 7, 2010
- Dale A. Harrison
- G01 - MEASURING TESTING
Information Patent Application
Broad band referencing reflectometer
- Publication number 20090002711
- Publication date Jan 1, 2009
- MetroSol, Inc.
- Dale A. Harrison
- G01 - MEASURING TESTING
Information Patent Application
Method and system for using reflectometry below deep ultra-violet (...
- Publication number 20080246951
- Publication date Oct 9, 2008
- Phillip Walsh
- G01 - MEASURING TESTING
Information Patent Application
Prism spectrometer
- Publication number 20080203314
- Publication date Aug 28, 2008
- Dale A. Harrison
- G01 - MEASURING TESTING
Information Patent Application
Spectrometer with collimated input light
- Publication number 20080204710
- Publication date Aug 28, 2008
- Dale A. Harrison
- G01 - MEASURING TESTING
Information Patent Application
Spectrometer with moveable detector element
- Publication number 20080204711
- Publication date Aug 28, 2008
- Dale A. Harrison
- G01 - MEASURING TESTING
Information Patent Application
Contamination monitoring and control techniques for use with an opt...
- Publication number 20080073560
- Publication date Mar 27, 2008
- Dale A. Harrison
- G01 - MEASURING TESTING
Information Patent Application
Broad band referencing reflectometer
- Publication number 20080042071
- Publication date Feb 21, 2008
- MetroSol, Inc.
- Dale A. Harrison
- G01 - MEASURING TESTING
Information Patent Application
Method and apparatus for accurate calibration of a reflectometer by...
- Publication number 20070215801
- Publication date Sep 20, 2007
- Phillip Walsh
- G01 - MEASURING TESTING
Information Patent Application
Method and apparatus for performing highly accurate thin film measu...
- Publication number 20070182970
- Publication date Aug 9, 2007
- Dale A. Harrison
- G01 - MEASURING TESTING
Information Patent Application
Method and apparatus for accurate calibration of VUV reflectometer
- Publication number 20070181793
- Publication date Aug 9, 2007
- Dale A. Harrison
- G01 - MEASURING TESTING
Information Patent Application
Method and apparatus for accurate calibration of a reflectometer by...
- Publication number 20070181795
- Publication date Aug 9, 2007
- Phillip Walsh
- G01 - MEASURING TESTING

Dale A. Harrison

Person

Patents Grantslast 30 patents

Vacuum ultraviolet absorption spectroscopy system and method

Vacuum ultraviolet absorption spectroscopy system and method

Vacuum ultraviolet absorption spectroscopy system and method

Method for detailed and bulk classification analysis of complex sam...

Vacuum ultraviolet absorption spectroscopy system and method

Vacuum ultraviolet absorption spectroscopy system and method

Vacuum ultraviolet absorption spectroscopy system and method

Vacuum ultraviolet absorption spectroscopy system and method

Methods and apparatus for vacuum ultraviolet (VUV) or shorter wavel...

Vacuum ultraviolet absorption spectroscopy system and method

Optical vacuum ultra-violet wavelength nanoimprint metrology

Polarization device for vacuum ultraviolet or shorter wavelengths

Methods and apparatus for vacuum ultraviolet (VUV) or shorter wavel...

Method and system for using reflectometry below deep ultra-violet (...

Automated calibration methodology for VUV metrology system

Method and apparatus for accurate calibration of VUV reflectometer

Broad band referencing reflectometer

Broad band referencing reflectometer

Method and apparatus for accurate calibration of VUV reflectometer

Spectrometer with collimated input light

Method and apparatus for accurate calibration of a reflectometer by...

Contamination monitoring and control techniques for use with an opt...

Contamination monitoring and control techniques for use with an opt...

Spectrometer with moveable detector element

Method and apparatus for accurate calibration of a reflectometer by...

Prism spectrometer

Vacuum ultra-violet reflectometer with stray light correction

Method and apparatus for performing highly accurate thin film measu...

Vacuum ultraviolet referencing reflectometer

Broad band referencing reflectometer

Patents Applicationslast 30 patents

Vacuum Ultraviolet Absorption Spectroscopy System And Method

Vacuum Ultraviolet Absorption Spectroscopy System And Method

Vacuum Ultraviolet Absorption Spectroscopy System And Method

Vacuum Ultraviolet Absorption Spectroscopy System And Method

Vacuum Ultraviolet Absorption Spectroscopy System And Method

Vacuum Ultraviolet Absorption Spectroscopy System And Method

Method For Detailed And Bulk Classification Analysis Of Complex Sam...

Vacuum Ultraviolet Absorption Spectroscopy System And Method

Methods And Apparatus For Vacuum Ultraviolet (VUV) Or Shorter Wavel...

Vacuum Ultraviolet Absorption Spectroscopy System And Method

METHODS AND APPARATUS FOR VACUUM ULTRAVIOLET (VUV) OR SHORTER WAVEL...

Optical Vacuum Ultra-Violet Wavelength Nanoimprint Metrology

BROAD BAND REFERENCING REFLECTOMETER

Method and Apparatus for Accurate Calibration of VUV Reflectometer

Automated calibration methodology for VUV metrology system

Method and System for Using Reflectometry Below Deep Ultra-Violet (...

COMBINED OPTICAL METROLOGY TECHNIQUES

Broad band referencing reflectometer

CONTAMINATION MONITORING AND CONTROL TECHNIQUES FOR USE WITH AN OPT...

Broad band referencing reflectometer

Method and system for using reflectometry below deep ultra-violet (...

Prism spectrometer

Spectrometer with collimated input light

Spectrometer with moveable detector element

Contamination monitoring and control techniques for use with an opt...

Broad band referencing reflectometer

Method and apparatus for accurate calibration of a reflectometer by...

Method and apparatus for performing highly accurate thin film measu...

Method and apparatus for accurate calibration of VUV reflectometer

Method and apparatus for accurate calibration of a reflectometer by...