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Dale E. Ibbotson
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Bridgewater, NJ, US
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last 30 patents
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Patent Grant
Plasma etch end point detection process
Patent number
5,877,407
Issue date
Mar 2, 1999
Lucent Technologies Inc.
Gardy Cadet
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Patent Grant
Active neural network determination of endpoint in a plasma etch pr...
Patent number
5,653,894
Issue date
Aug 5, 1997
Lucent Technologies Inc.
Dale Edward Ibbotson
G05 - CONTROLLING REGULATING
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Patent Grant
Method and apparatus for real time monitoring of wafer attributes i...
Patent number
5,654,903
Issue date
Aug 5, 1997
Lucent Technologies Inc.
Edward A. Reitman
G05 - CONTROLLING REGULATING
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Patent Grant
Process for fabricating a device using an ellipsometric technique
Patent number
5,494,697
Issue date
Feb 27, 1996
AT&T Corp.
Nadine Blayo
G01 - MEASURING TESTING