Dale R. DU BOIS

Person

Los Gatos, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Dual temperature heater
- Patent number 11,133,210
- Issue date Sep 28, 2021
- Applied Materials, Inc.
- Dale R. Du Bois
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Loadlock integrated bevel etcher system
- Patent number 11,031,262
- Issue date Jun 8, 2021
- Applied Materials, Inc.
- Saptarshi Basu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Chamber design for semiconductor processing
- Patent number 11,004,663
- Issue date May 11, 2021
- Applied Materials, Inc.
- Juan Carlos Rocha-Alvarez
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-zone pedestal for plasma processing
- Patent number 10,971,389
- Issue date Apr 6, 2021
- Applied Materials, Inc.
- Xing Lin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Tunable ground planes in plasma chambers
- Patent number 10,774,423
- Issue date Sep 15, 2020
- Applied Materials, Inc.
- Karthik Janakiraman
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Temperature measurement in multi-zone heater
- Patent number 10,720,349
- Issue date Jul 21, 2020
- Applied Materials, Inc.
- Dale R. Du Bois
- G01 - MEASURING TESTING
Information Patent Grant
Micro-volume deposition chamber
- Patent number 10,711,347
- Issue date Jul 14, 2020
- Applied Materials, Inc.
- Dale R. DuBois
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Loadlock integrated bevel etcher system
- Patent number 10,636,684
- Issue date Apr 28, 2020
- Applied Materials, Inc.
- Saptarshi Basu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for UV treatment, chemical treatment, and depo...
- Patent number 10,570,517
- Issue date Feb 25, 2020
- Applied Materials, Inc.
- Amit Bansal
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
In-situ metrology method for thickness measurement during PECVD pro...
- Patent number 10,527,407
- Issue date Jan 7, 2020
- Applied Materials, Inc.
- Khokan C. Paul
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Wafer swapper
- Patent number 10,518,418
- Issue date Dec 31, 2019
- Applied Materials, Inc.
- Dale R. Du Bois
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Loadlock integrated bevel etcher system
- Patent number 10,403,515
- Issue date Sep 3, 2019
- Applied Materials, Inc.
- Saptarshi Basu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Dual temperature heater
- Patent number 10,325,799
- Issue date Jun 18, 2019
- Applied Materials, Inc.
- Dale R. Du Bois
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
In-situ metrology method for thickness measurement during PECVD pro...
- Patent number 10,281,261
- Issue date May 7, 2019
- Applied Materials, Inc.
- Khokan C. Paul
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas distribution apparatus for processing chambers
- Patent number 10,240,234
- Issue date Mar 26, 2019
- Applied Materials, Inc.
- Dale R. Du Bois
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Processing system containing an isolation region separating a depos...
- Patent number 10,236,197
- Issue date Mar 19, 2019
- Applied Materials, Inc.
- Karthik Janakiraman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Shadow ring for modifying wafer edge and bevel deposition
- Patent number 10,227,695
- Issue date Mar 12, 2019
- Applied Materials, Inc.
- Dale R. Du Bois
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate temperature measurement in multi-zone heater
- Patent number 10,153,185
- Issue date Dec 11, 2018
- Applied Materials, Inc.
- Dale R. Du Bois
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Process kit including flow isolator ring
- Patent number 10,113,231
- Issue date Oct 30, 2018
- Applied Materials, Inc.
- Dale R. Dubois
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and system for supplying a cleaning gas into a process chamber
- Patent number 10,094,486
- Issue date Oct 9, 2018
- Applied Materials, Inc.
- Ramprakash Sankarakrishnan
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Multi-zone pedestal for plasma processing
- Patent number 10,090,187
- Issue date Oct 2, 2018
- Applied Materials, Inc.
- Xing Lin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Slit valve apparatus, systems, and methods
- Patent number 10,023,954
- Issue date Jul 17, 2018
- Applied Materials, Inc.
- John J. Mazzocco
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Wafer rotation in a semiconductor chamber
- Patent number 9,922,819
- Issue date Mar 20, 2018
- Applied Materials, Inc.
- Ganesh Balasubramanian
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Wafer swapper
- Patent number 9,889,567
- Issue date Feb 13, 2018
- Applied Materials, Inc.
- Dale R. Du Bois
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Multi-zone pedestal for plasma processing
- Patent number 9,725,806
- Issue date Aug 8, 2017
- Applied Materials, Inc.
- Xing Lin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Wafer rotation in a semiconductor chamber
- Patent number 9,593,419
- Issue date Mar 14, 2017
- Applied Materials, Inc.
- Ganesh Balasubramanian
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process load lock apparatus, lift assemblies, electronic device pro...
- Patent number 9,355,876
- Issue date May 31, 2016
- Applied Materials, Inc.
- Paul B. Reuter
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Method and system for supplying a cleaning gas into a process chamber
- Patent number 9,206,511
- Issue date Dec 8, 2015
- Applied Materials, Inc.
- Ramprakash Sankarakrishnan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and methods for improving reliability of RF grounding
- Patent number 8,884,524
- Issue date Nov 11, 2014
- Applied Materials, Inc.
- Jianhua Zhou
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Confined process volume PECVD chamber
- Patent number 8,778,813
- Issue date Jul 15, 2014
- Applied Materials, Inc.
- Ramprakash Sankarakrishnan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
CHAMBER DESIGN FOR SEMICONDUCTOR PROCESSING
- Publication number 20210217592
- Publication date Jul 15, 2021
- Applied Materials, Inc.
- Juan Carlos ROCHA-ALVAREZ
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LOADLOCK INTEGRATED BEVEL ETCHER SYSTEM
- Publication number 20200234982
- Publication date Jul 23, 2020
- Applied Materials, Inc.
- Saptarshi BASU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LOADLOCK INTEGRATED BEVEL ETCHER SYSTEM
- Publication number 20190371630
- Publication date Dec 5, 2019
- Applied Materials, Inc.
- Saptarshi BASU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DUAL TEMPERATURE HEATER
- Publication number 20190304825
- Publication date Oct 3, 2019
- Applied Materials, Inc.
- Dale R. Du BOIS
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
IN-SITU METROLOGY METHOD FOR THICKNESS MEASUREMENT DURING PECVD PRO...
- Publication number 20190212128
- Publication date Jul 11, 2019
- Applied Materials, Inc.
- Khokan C. PAUL
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TEMPERATURE MEASUREMENT IN MULTI-ZONE HEATER
- Publication number 20190206706
- Publication date Jul 4, 2019
- Applied Materials, Inc.
- Dale R. Du Bois
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-ZONE PEDESTAL FOR PLASMA PROCESSING
- Publication number 20190035665
- Publication date Jan 31, 2019
- Applied Materials, Inc.
- XING LIN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Gas Distribution Apparatus for Processing Chambers
- Publication number 20180237915
- Publication date Aug 23, 2018
- Applied Materials, Inc.
- Dale R. DU BOIS
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
WAFER SWAPPER
- Publication number 20180117771
- Publication date May 3, 2018
- Applied Materials, Inc.
- Dale R. DU BOIS
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
TUNABLE GROUND PLANES IN PLASMA CHAMBERS
- Publication number 20180073142
- Publication date Mar 15, 2018
- Applied Materials, Inc.
- Karthik Janakiraman
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Micro-Volume Deposition Chamber
- Publication number 20170298509
- Publication date Oct 19, 2017
- Applied Materials, Inc.
- Dale R. DuBois
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MULTI-ZONE PEDESTAL FOR PLASMA PROCESSING
- Publication number 20170263484
- Publication date Sep 14, 2017
- Applied Materials, Inc.
- XING LIN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CERAMIC SHOWERHEAD WITH EMBEDDED CONDUCTIVE LAYERS
- Publication number 20170211185
- Publication date Jul 27, 2017
- Applied Materials, Inc.
- Dale R. DU BOIS
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
WAFER ROTATION IN A SEMICONDUCTOR CHAMBER
- Publication number 20170162385
- Publication date Jun 8, 2017
- Applied Materials, Inc.
- Ganesh BALASUBRAMANIAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LOADLOCK INTEGRATED BEVEL ETCHER SYSTEM
- Publication number 20170092511
- Publication date Mar 30, 2017
- Applied Materials, Inc.
- Saptarshi BASU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
IN-SITU METROLOGY METHOD FOR THICKNESS MEASUREMENT DURING PECVD PRO...
- Publication number 20160370173
- Publication date Dec 22, 2016
- Applied Materials, Inc.
- Khokan C. PAUL
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
WAFER SWAPPER
- Publication number 20160314995
- Publication date Oct 27, 2016
- Applied Materials, Inc.
- Dale R. DU BOIS
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
PROCESS KIT INCLUDING FLOW ISOLATOR RING
- Publication number 20160312359
- Publication date Oct 27, 2016
- Applied Materials, Inc.
- Dale R. DUBOIS
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS AND METHOD FOR UV TREATMENT, CHEMICAL TREATMENT, AND DEPO...
- Publication number 20160289838
- Publication date Oct 6, 2016
- Applied Materials, Inc.
- Amit BANSAL
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE LIFT ASSEMBLIES
- Publication number 20160240410
- Publication date Aug 18, 2016
- Applied Materials, Inc.
- Paul B. Reuter
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TUNABLE GROUND PLANES IN PLASMA CHAMBERS
- Publication number 20160145742
- Publication date May 26, 2016
- Applied Materials, Inc.
- Karthik Janakiraman
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Processing System Containing An Isolation Region separating a Depos...
- Publication number 20160133489
- Publication date May 12, 2016
- Applied Materials, Inc.
- Karthik JANAKIRAMAN
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
DUAL TEMPERATURE HEATER
- Publication number 20160093521
- Publication date Mar 31, 2016
- Applied Materials, Inc.
- Dale R. DU BOIS
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND SYSTEM FOR SUPPLYING A CLEANING GAS INTO A PROCESS CHAMBER
- Publication number 20160084400
- Publication date Mar 24, 2016
- Applied Materials, Inc.
- Ramprakash SANKARAKRISHNAN
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
MULTI-ZONE PEDESTAL FOR PLASMA PROCESSING
- Publication number 20160002779
- Publication date Jan 7, 2016
- Applied Materials, Inc.
- XING LIN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CHAMBER DESIGN FOR SEMICONDUCTOR PROCESSING
- Publication number 20150380217
- Publication date Dec 31, 2015
- Applied Materials, Inc.
- Juan Carlos ROCHA-ALVAREZ
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TEMPERATURE MEASUREMENT IN MULTI-ZONE HEATER
- Publication number 20150371881
- Publication date Dec 24, 2015
- Applied Materials, Inc.
- Dale R. DU BOIS
- G01 - MEASURING TESTING
Information Patent Application
WAFER ROTATION IN A SEMICONDUCTOR CHAMBER
- Publication number 20150262859
- Publication date Sep 17, 2015
- Applied Materials, Inc.
- Ganesh BALASUBRAMANIAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESS LOAD LOCK APPARATUS, LIFT ASSEMBLIES, ELECTRONIC DEVICE PRO...
- Publication number 20140262036
- Publication date Sep 18, 2014
- Applied Materials, Inc.
- Paul B. Reuter
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PEALD APPARATUS TO ENABLE RAPID CYCLING
- Publication number 20140261178
- Publication date Sep 18, 2014
- Dale R. DU BOIS
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Dale R. DU BOIS

Person

Patents Grantslast 30 patents

Dual temperature heater

Loadlock integrated bevel etcher system

Chamber design for semiconductor processing

Multi-zone pedestal for plasma processing

Tunable ground planes in plasma chambers

Temperature measurement in multi-zone heater

Micro-volume deposition chamber

Loadlock integrated bevel etcher system

Apparatus and method for UV treatment, chemical treatment, and depo...

In-situ metrology method for thickness measurement during PECVD pro...

Wafer swapper

Loadlock integrated bevel etcher system

Dual temperature heater

In-situ metrology method for thickness measurement during PECVD pro...

Gas distribution apparatus for processing chambers

Processing system containing an isolation region separating a depos...

Shadow ring for modifying wafer edge and bevel deposition

Substrate temperature measurement in multi-zone heater

Process kit including flow isolator ring

Method and system for supplying a cleaning gas into a process chamber

Multi-zone pedestal for plasma processing

Slit valve apparatus, systems, and methods

Wafer rotation in a semiconductor chamber

Wafer swapper

Multi-zone pedestal for plasma processing

Wafer rotation in a semiconductor chamber

Process load lock apparatus, lift assemblies, electronic device pro...

Method and system for supplying a cleaning gas into a process chamber

Apparatus and methods for improving reliability of RF grounding

Confined process volume PECVD chamber

Patents Applicationslast 30 patents

CHAMBER DESIGN FOR SEMICONDUCTOR PROCESSING

LOADLOCK INTEGRATED BEVEL ETCHER SYSTEM

LOADLOCK INTEGRATED BEVEL ETCHER SYSTEM

DUAL TEMPERATURE HEATER

IN-SITU METROLOGY METHOD FOR THICKNESS MEASUREMENT DURING PECVD PRO...

TEMPERATURE MEASUREMENT IN MULTI-ZONE HEATER

MULTI-ZONE PEDESTAL FOR PLASMA PROCESSING

Gas Distribution Apparatus for Processing Chambers

WAFER SWAPPER

TUNABLE GROUND PLANES IN PLASMA CHAMBERS

Micro-Volume Deposition Chamber

MULTI-ZONE PEDESTAL FOR PLASMA PROCESSING

CERAMIC SHOWERHEAD WITH EMBEDDED CONDUCTIVE LAYERS

WAFER ROTATION IN A SEMICONDUCTOR CHAMBER

LOADLOCK INTEGRATED BEVEL ETCHER SYSTEM

IN-SITU METROLOGY METHOD FOR THICKNESS MEASUREMENT DURING PECVD PRO...

WAFER SWAPPER

PROCESS KIT INCLUDING FLOW ISOLATOR RING

APPARATUS AND METHOD FOR UV TREATMENT, CHEMICAL TREATMENT, AND DEPO...

SUBSTRATE LIFT ASSEMBLIES

TUNABLE GROUND PLANES IN PLASMA CHAMBERS

Processing System Containing An Isolation Region separating a Depos...

DUAL TEMPERATURE HEATER

METHOD AND SYSTEM FOR SUPPLYING A CLEANING GAS INTO A PROCESS CHAMBER

MULTI-ZONE PEDESTAL FOR PLASMA PROCESSING

CHAMBER DESIGN FOR SEMICONDUCTOR PROCESSING

TEMPERATURE MEASUREMENT IN MULTI-ZONE HEATER

WAFER ROTATION IN A SEMICONDUCTOR CHAMBER

PROCESS LOAD LOCK APPARATUS, LIFT ASSEMBLIES, ELECTRONIC DEVICE PRO...

PEALD APPARATUS TO ENABLE RAPID CYCLING