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Yongin-si, KR
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Patents Grants
last 30 patents
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Patent Grant
Wafer clamping apparatus
Patent number
9,768,051
Issue date
Sep 19, 2017
Samsung Electronics Co., Ltd.
Xinglong Chen
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
WAFER CLAMPING APPARATUS
Publication number
20170018451
Publication date
Jan 19, 2017
Samsung Electronics Co., Ltd.
Xinglong CHEN
H01 - BASIC ELECTRIC ELEMENTS