Damian Brennan

Follow

Person

Gloucester, MA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Method, system, and apparatus for improving doping uniformity in hi...
- Patent number 7,462,844
- Issue date Dec 9, 2008
- Varian Semiconductor Equipment Associates, Inc.
- Shengwu Chang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Technique for tuning an ion implanter system
- Patent number 7,397,047
- Issue date Jul 8, 2008
- Varian Semiconductor Equipment Associates, Inc.
- Shengwu Chang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Technique for uniformity tuning in an ion implanter system
- Patent number 7,355,188
- Issue date Apr 8, 2008
- Varian Semiconductor Equipment Associates, Inc.
- Joseph C. Olson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Technique for uniformity tuning in an ion implanter system
- Patent number 7,253,423
- Issue date Aug 7, 2007
- Varian Semiconductor Equipment Associates, Inc.
- Shengwu Chang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion beam incidence angle and beam divergence monitor
- Patent number 6,690,022
- Issue date Feb 10, 2004
- Varian Semiconductor Equipment Associates, Inc.
- Grant Kenji Larsen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for low energy ion implantation
- Patent number 6,528,804
- Issue date Mar 4, 2003
- Varian Semiconductor Equipment Associate, Inc.
- Philip Sullivan
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Method, system, and apparatus for improving doping uniformity in hi...
- Publication number 20070085037
- Publication date Apr 19, 2007
- Shengwu Chang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Technique for uniformity tuning in an ion implanter system
- Publication number 20060284114
- Publication date Dec 21, 2006
- Varian Semiconductor Equipment Associates, Inc.
- Joseph C. Olson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Technique for uniformity tuning in an ion implanter system
- Publication number 20060266957
- Publication date Nov 30, 2006
- Shengwu Chang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Technique for tuning an ion implanter system
- Publication number 20060249696
- Publication date Nov 9, 2006
- Shengwu Chang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Ion implant ion beam parallelism and direction integrity determinat...
- Publication number 20060169922
- Publication date Aug 3, 2006
- Shengwu Chang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
In situ ion beam incidence angle and beam divergence monitor
- Publication number 20020121889
- Publication date Sep 5, 2002
- Varian Semiconductor Equipment Associates, Inc.
- Grant Kenji Larsen
- H01 - BASIC ELECTRIC ELEMENTS