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Damodar Shanbhag
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Tualatin, OR, US
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Patents Grants
last 30 patents
Information
Patent Grant
Manifold valve for controlling multiple gases
Patent number
11,859,282
Issue date
Jan 2, 2024
Lam Research Corporation
Damodar Rajaram Shanbhag
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Manifold valve for multiple precursors
Patent number
11,427,908
Issue date
Aug 30, 2022
Lam Research Corporation
Damodar Rajaram Shanbhag
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Ex situ coating of chamber components for semiconductor processing
Patent number
11,365,479
Issue date
Jun 21, 2022
Lam Research Corporation
Damodar Shanbhag
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Substrate processing chamber with showerhead having cooled faceplate
Patent number
10,900,124
Issue date
Jan 26, 2021
Lam Research Corporation
Damodar Rajaram Shanbhag
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ex situ coating of chamber components for semiconductor processing
Patent number
10,760,158
Issue date
Sep 1, 2020
Lam Research Corporation
Damodar Shanbhag
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Turbulent flow spiral multi-zone precursor vaporizer
Patent number
10,147,597
Issue date
Dec 4, 2018
Lam Research Corporation
James Forest Lee
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
MANIFOLD VALVE FOR CONTROLLING MULTIPLE GASES
Publication number
20220372619
Publication date
Nov 24, 2022
LAM RESEARCH CORPORATION
Damodar Rajaram Shanbhag
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
FRICTION STIR WELDING IN SEMICONDUCTOR MANUFACTURING APPLICATIONS
Publication number
20220189817
Publication date
Jun 16, 2022
LAM RESEARCH CORPORATION
Nick Ray Linebarger
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
MANIFOLD VALVE FOR MULTIPLE PRECURSORS
Publication number
20210040611
Publication date
Feb 11, 2021
LAM RESEARCH CORPORATION
Damodar Rajaram Shanbhag
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
EX SITU COATING OF CHAMBER COMPONENTS FOR SEMICONDUCTOR PROCESSING
Publication number
20200347497
Publication date
Nov 5, 2020
LAM RESEARCH CORPORATION
Damodar Shanbhag
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE PROCESSING CHAMBER WITH SHOWERHEAD HAVING COOLED FACEPLATE
Publication number
20190376183
Publication date
Dec 12, 2019
LAM RESEARCH CORPORATION
Damodar Rajaram Shanbhag
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
EX SITU COATING OF CHAMBER COMPONENTS FOR SEMICONDUCTOR PROCESSING
Publication number
20190185999
Publication date
Jun 20, 2019
LAM RESEARCH CORPORATION
Damodar Shanbhag
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...