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Damon Vincent Williams
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Fremont, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Polishing apparatus and methods having high processing workload for...
Patent number
7,481,695
Issue date
Jan 27, 2009
Lam Research Corporation
Miguel A. Saldana
B24 - GRINDING POLISHING
Information
Patent Grant
Apparatus for controlling retaining ring and wafer head tilt for ch...
Patent number
6,976,903
Issue date
Dec 20, 2005
Lam Research Corporation
Damon Vincent Williams
B24 - GRINDING POLISHING
Information
Patent Grant
Apparatus and methods for detecting transitions of wafer surface pr...
Patent number
6,937,915
Issue date
Aug 30, 2005
Lam Research Corporation
Rodney Kistler
B24 - GRINDING POLISHING
Information
Patent Grant
Methods for detecting transitions of wafer surface properties in ch...
Patent number
6,925,348
Issue date
Aug 2, 2005
Lam Research Corporation
Rodney Kistler
B24 - GRINDING POLISHING
Information
Patent Grant
Methods for aligning a surface of an active retainer ring with a wa...
Patent number
6,843,707
Issue date
Jan 18, 2005
Lam Research Corporation
Miguel Angel Saldana
B24 - GRINDING POLISHING
Information
Patent Grant
Chemical mechanical polishing apparatus and methods with porous vac...
Patent number
6,752,703
Issue date
Jun 22, 2004
Lam Research Corporation
John M. Boyd
B24 - GRINDING POLISHING
Information
Patent Grant
Active retaining ring support
Patent number
6,719,874
Issue date
Apr 13, 2004
Lam Research Corporation
Yehiel Gotkis
B24 - GRINDING POLISHING
Information
Patent Grant
Apparatus for aligning a surface of an active retainer ring with a...
Patent number
6,709,322
Issue date
Mar 23, 2004
Lam Research Corporation
Miguel Angel Saldana
B24 - GRINDING POLISHING
Information
Patent Grant
System for wafer carrier in-process clean and rinse
Patent number
6,659,116
Issue date
Dec 9, 2003
Lam Research Corporation
Damon Vincent Williams
B24 - GRINDING POLISHING
Information
Patent Grant
Methods for controlling retaining ring and wafer head tilt for chem...
Patent number
6,652,357
Issue date
Nov 25, 2003
Lam Research Corporation
Damon Vincent Williams
B24 - GRINDING POLISHING
Information
Patent Grant
Chemical mechanical polishing apparatus and methods with central co...
Patent number
6,640,155
Issue date
Oct 28, 2003
Lam Research Corporation
Miguel A. Saldana
B24 - GRINDING POLISHING
Information
Patent Grant
Apparatus and methods for controlling pad conditioning head tilt fo...
Patent number
6,443,815
Issue date
Sep 3, 2002
Lam Research Corporation
Damon Vincent Williams
B24 - GRINDING POLISHING
Patents Applications
last 30 patents
Information
Patent Application
Methods for detecting transitions of wafer surface properties in ch...
Publication number
20050054268
Publication date
Mar 10, 2005
Lam Research Corporation
Rodney Kistler
B24 - GRINDING POLISHING
Information
Patent Application
Methods for aligning a surface of an active retainer ring with a wa...
Publication number
20040102138
Publication date
May 27, 2004
Lam Research Corporation
Miguel Angel Saldana
B24 - GRINDING POLISHING
Information
Patent Application
Chemical mechanical polishing apparatus and methods with porous vac...
Publication number
20030119431
Publication date
Jun 26, 2003
Lam Research Corporation
John M. Boyd
B24 - GRINDING POLISHING
Information
Patent Application
Chemical mechanical polishing apparatus and methods with central co...
Publication number
20020188370
Publication date
Dec 12, 2002
Miguel A. Saldana
B24 - GRINDING POLISHING
Information
Patent Application
Apparatus and methods for aligning a surface of an active retainer...
Publication number
20020151254
Publication date
Oct 17, 2002
Miguel Angel Saldana
B24 - GRINDING POLISHING
Information
Patent Application
Polishing apparatus and methods having high processing workload for...
Publication number
20020146970
Publication date
Oct 10, 2002
Lam Research Corporation
Miguel A. Saldana
B24 - GRINDING POLISHING