Dan A. Marohl

Person

San Jose, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Collaborative robot system on a mobile cart with a chamber docking...
- Patent number 12,186,887
- Issue date Jan 7, 2025
- Lam Research Corporation
- Vitali Brand
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Tunable temperature controlled substrate support assembly
- Patent number 12,009,244
- Issue date Jun 11, 2024
- Applied Materials, Inc.
- Vijay D. Parkhe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Consolidated filter arrangement for devices in an RF environment
- Patent number 11,870,252
- Issue date Jan 9, 2024
- Applied Materials, Inc.
- Phillip Criminale
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Substrate carrier using a proportional thermal fluid delivery system
- Patent number 11,615,973
- Issue date Mar 28, 2023
- Applied Materials, Inc.
- Phillip Criminale
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Articulated direct-mount inductor and associated systems and methods
- Patent number 10,923,322
- Issue date Feb 16, 2021
- Lam Research Corporation
- Oscar Lopez
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Consolidated filter arrangement for devices in an RF environment
- Patent number 10,820,377
- Issue date Oct 27, 2020
- Applied Materials, Inc.
- Phillip Criminale
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Consolidated filter arrangement for devices in an RF environment
- Patent number 10,820,378
- Issue date Oct 27, 2020
- Applied Materials, Inc.
- Phillip Criminale
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Power deposition control in inductively coupled plasma (ICP) reactors
- Patent number 10,553,398
- Issue date Feb 4, 2020
- Applied Materials, Inc.
- Samer Banna
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Tunable temperature controlled substrate support assembly
- Patent number 10,535,544
- Issue date Jan 14, 2020
- Applied Materials, Inc.
- Vijay D. Parkhe
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Substrate carrier using a proportional thermal fluid delivery system
- Patent number 10,490,429
- Issue date Nov 26, 2019
- Applied Materials, Inc.
- Phillip Criminale
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Universal non-invasive chamber impedance measurement system and ass...
- Patent number 10,109,460
- Issue date Oct 23, 2018
- Lam Research Corporation
- Chin-Yi Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Consolidated filter arrangement for devices in an RF environment
- Patent number 9,872,341
- Issue date Jan 16, 2018
- Applied Materials, Inc.
- Phillip Criminale
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Tunable temperature controlled substrate support assembly
- Patent number 9,472,435
- Issue date Oct 18, 2016
- Applied Materials, Inc.
- Vijay D. Parkhe
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Single wafer apparatus for drying semiconductor substrates using an...
- Patent number 8,322,045
- Issue date Dec 4, 2012
- Applied Materials, Inc.
- Nathan D. Stein
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of depositing materials on a non-planar surface
- Patent number 8,318,609
- Issue date Nov 27, 2012
- Solyndra LLC
- Dan Marohl
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Retaining ring with tapered inner surface
- Patent number 7,934,979
- Issue date May 3, 2011
- Applied Materials, Inc.
- Dan A. Marohl
- B24 - GRINDING POLISHING
Information Patent Grant
Scrubber box and methods for using the same
- Patent number 7,774,887
- Issue date Aug 17, 2010
- Applied Materials, Inc.
- Joseph Yudovsky
- B08 - CLEANING
Information Patent Grant
Retaining ring with flange for chemical mechanical polishing
- Patent number 7,677,958
- Issue date Mar 16, 2010
- Applied Materials, Inc.
- Dan A. Marohl
- B24 - GRINDING POLISHING
Information Patent Grant
Electro-chemical deposition system
- Patent number 7,497,932
- Issue date Mar 3, 2009
- Applied Materials, Inc.
- Yezdi Dordi
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Scrubber box
- Patent number 7,377,002
- Issue date May 27, 2008
- Applied Materials, Inc.
- Joseph Yudovsky
- B08 - CLEANING
Information Patent Grant
Retaining ring with flange for chemical mechanical polishing
- Patent number 7,094,139
- Issue date Aug 22, 2006
- Applied Materials, Inc.
- Dan A. Marohl
- B24 - GRINDING POLISHING
Information Patent Grant
Integrated platen assembly for a chemical mechanical planarization...
- Patent number 6,837,964
- Issue date Jan 4, 2005
- Applied Materials, Inc.
- Timothy J. Franklin
- B24 - GRINDING POLISHING
Information Patent Grant
Electro-chemical deposition system
- Patent number 6,635,157
- Issue date Oct 21, 2003
- Applied Materials, Inc.
- Yezdi Dordi
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Transfer chamber with side wall port
- Patent number 6,568,896
- Issue date May 27, 2003
- Applied Materials, Inc.
- Timothy J. Franklin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Integrated platen assembly for a chemical mechanical planarization...
- Patent number 6,503,131
- Issue date Jan 7, 2003
- Applied Materials, Inc.
- Timothy J. Franklin
- B24 - GRINDING POLISHING
Information Patent Grant
End effector for wafer handler in processing system
- Patent number 6,409,453
- Issue date Jun 25, 2002
- Applied Materials, Inc.
- Jeff Brodine
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
End effector for semiconductor wafer transfer device and method of...
- Patent number 6,267,423
- Issue date Jul 31, 2001
- Applied Materials, Inc.
- Dan A. Marohl
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Degassing method using simultaneous dry gas flux pressure and vacuum
- Patent number 6,263,587
- Issue date Jul 24, 2001
- Applied Materials, Inc.
- Ivo Raaijmakers
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Electro-chemical deposition system
- Patent number 6,258,220
- Issue date Jul 10, 2001
- Applied Materials, Inc.
- Yezdi Dordi
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Degassing method and apparatus
- Patent number 6,182,376
- Issue date Feb 6, 2001
- Applied Materials, Inc.
- Ho Seon Shin
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
TUNABLE ESC FOR RAPID ALTERNATING PROCESS APPLICATIONS
- Publication number 20250054738
- Publication date Feb 13, 2025
- LAM RESEARCH CORPORATION
- Dan MAROHL
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TUNABLE TEMPERATURE CONTROLLED SUBSTRATE SUPPORT ASSEMBLY
- Publication number 20240321620
- Publication date Sep 26, 2024
- Applied Materials, Inc.
- Vijay D. PARKHE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ADJUSTABLE DIELECTRIC CONSTANT CERAMIC WINDOW
- Publication number 20240162010
- Publication date May 16, 2024
- LAM RESEARCH CORPORATION
- Chin-Yi Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COLLABORATIVE ROBOT SYSTEM ON A MOBILE CART WITH A CHAMBER DOCKING...
- Publication number 20240009856
- Publication date Jan 11, 2024
- LAM RESEARCH CORPORATION
- Vitali Brand
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
CARRIER RING FOR FLOATING TCP CHAMBER GAS PLATE
- Publication number 20230402264
- Publication date Dec 14, 2023
- LAM RESEARCH CORPORATION
- Gordon PENG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COLD EDGE LOW TEMPERATURE ELECTROSTATIC CHUCK
- Publication number 20230395359
- Publication date Dec 7, 2023
- LAM RESEARCH CORPORATION
- Ambarish Chhatre
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
THIN SHADOW RING FOR LOW-TILT TRENCH ETCHING
- Publication number 20230298929
- Publication date Sep 21, 2023
- LAM RESEARCH CORPORATION
- David SETTON
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Selected Reject Band Non-Radiofrequency-Coupling Tile and Associate...
- Publication number 20230262898
- Publication date Aug 17, 2023
- LAM RESEARCH CORPORATION
- Sunil KAPOOR
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MID-CHAMBER FLOW OPTIMIZER
- Publication number 20230178342
- Publication date Jun 8, 2023
- LAM RESEARCH CORPORATION
- Craig Rosslee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTIZONE GAS DISTRIBUTION PLATE FOR TRENCH PROFILE OPTIMIZATION
- Publication number 20230091524
- Publication date Mar 23, 2023
- LAM RESEARCH CORPORATION
- Gordon PENG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLANAR MULTI-LAYER RADIO FREQUENCY FILTERS INCLUDING STACKED COILS...
- Publication number 20230071933
- Publication date Mar 9, 2023
- LAM RESEARCH CORPORATION
- Sunil KAPOOR
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS FOR USING A TRANSFORMER TO ACHIEVE UNIFORMITY I...
- Publication number 20230009651
- Publication date Jan 12, 2023
- LAM RESEARCH CORPORATION
- Sunil Kapoor
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE SUPPORTS WITH INTEGRATED RF FILTERS
- Publication number 20220415625
- Publication date Dec 29, 2022
- LAM RESEARCH CORPORATION
- Sunil KAPOOR
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEGMENTED GAS DISTRIBUTION PLATE FOR HIGH-POWER, HIGH-PRESSURE PROC...
- Publication number 20220375725
- Publication date Nov 24, 2022
- LAM RESEARCH CORPORATION
- Gordon PENG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Components and Processes for Managing Plasma Process Byproduct Mate...
- Publication number 20210225616
- Publication date Jul 22, 2021
- LAM RESEARCH CORPORATION
- Gordon Wen-Yin Peng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CONSOLIDATED FILTER ARRANGEMENT FOR DEVICES IN AN RF ENVIRONMENT
- Publication number 20210059018
- Publication date Feb 25, 2021
- Applied Materials, Inc.
- Phillip Criminale
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Application
SUBSTRATE PROCESSING SYSTEM INCLUDING COIL WITH RF POWERED FARADAY...
- Publication number 20200411297
- Publication date Dec 31, 2020
- LAM RESEARCH CORPORATION
- Shen Peng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COIL AND WINDOW FOR PLASMA PROCESSING SYSTEM
- Publication number 20200234920
- Publication date Jul 23, 2020
- LAM RESEARCH CORPORATION
- Shen PENG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TUNABLE TEMPERATURE CONTROLLED SUBSTRATE SUPPORT ASSEMBLY
- Publication number 20200152500
- Publication date May 14, 2020
- Applied Materials, Inc.
- Vijay D. PARKHE
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
SUBSTRATE CARRIER USING A PROPORTIONAL THERMAL FLUID DELIVERY SYSTEM
- Publication number 20200051839
- Publication date Feb 13, 2020
- Applied Materials, Inc.
- Phillip Criminale
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TUNABLE ESC FOR RAPID ALTERNATING PROCESS APPLICATIONS
- Publication number 20190214236
- Publication date Jul 11, 2019
- LAM RESEARCH CORPORATION
- Dan MAROHL
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Articulated Direct-Mount Inductor and Associated Systems and Methods
- Publication number 20180366301
- Publication date Dec 20, 2018
- LAM RESEARCH CORPORATION
- Oscar Lopez
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
CONSOLIDATED FILTER ARRANGEMENT FOR DEVICES IN AN RF ENVIRONMENT
- Publication number 20180160474
- Publication date Jun 7, 2018
- Applied Materials, Inc.
- Phillip Criminale
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
CONSOLIDATED FILTER ARRANGEMENT FOR DEVICES IN AN RF ENVIRONMENT
- Publication number 20180160475
- Publication date Jun 7, 2018
- Applied Materials, Inc.
- Phillip Criminale
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Universal Non-Invasive Chamber Impedance Measurement System and Ass...
- Publication number 20180151331
- Publication date May 31, 2018
- LAM RESEARCH CORPORATION
- Chin-Yi Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS FOR RF POWER RATIO SWITCHING FOR ITERATIVE TRAN...
- Publication number 20180047543
- Publication date Feb 15, 2018
- LAM RESEARCH CORPORATION
- David Setton
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING SYSTEM INCLUDING COIL WITH RF POWERED FARADAY...
- Publication number 20170278680
- Publication date Sep 28, 2017
- LAM RESEARCH CORPORATION
- Shen Peng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TUNABLE TEMPERATURE CONTROLLED SUBSTRATE SUPPORT ASSEMBLY
- Publication number 20160329231
- Publication date Nov 10, 2016
- Applied Materials, Inc.
- Vijay D. PARKHE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CONSOLIDATED FILTER ARRANGEMENT FOR DEVICES IN AN RF ENVIRONMENT
- Publication number 20160149482
- Publication date May 26, 2016
- Applied Materials, Inc.
- Phillip Criminale
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Application
CONTROL ARCHITECTURE FOR DEVICES IN AN RF ENVIRONMENT
- Publication number 20160149733
- Publication date May 26, 2016
- Applied Materials, Inc.
- Phillip Criminale
- H04 - ELECTRIC COMMUNICATION TECHNIQUE

Dan A. Marohl

Person

Patents Grantslast 30 patents

Collaborative robot system on a mobile cart with a chamber docking...

Tunable temperature controlled substrate support assembly

Consolidated filter arrangement for devices in an RF environment

Substrate carrier using a proportional thermal fluid delivery system

Articulated direct-mount inductor and associated systems and methods

Consolidated filter arrangement for devices in an RF environment

Consolidated filter arrangement for devices in an RF environment

Power deposition control in inductively coupled plasma (ICP) reactors

Tunable temperature controlled substrate support assembly

Substrate carrier using a proportional thermal fluid delivery system

Universal non-invasive chamber impedance measurement system and ass...

Consolidated filter arrangement for devices in an RF environment

Tunable temperature controlled substrate support assembly

Single wafer apparatus for drying semiconductor substrates using an...

Method of depositing materials on a non-planar surface

Retaining ring with tapered inner surface

Scrubber box and methods for using the same

Retaining ring with flange for chemical mechanical polishing

Electro-chemical deposition system

Scrubber box

Retaining ring with flange for chemical mechanical polishing

Integrated platen assembly for a chemical mechanical planarization...

Electro-chemical deposition system

Transfer chamber with side wall port

Integrated platen assembly for a chemical mechanical planarization...

End effector for wafer handler in processing system

End effector for semiconductor wafer transfer device and method of...

Degassing method using simultaneous dry gas flux pressure and vacuum

Electro-chemical deposition system

Degassing method and apparatus

Patents Applicationslast 30 patents

TUNABLE ESC FOR RAPID ALTERNATING PROCESS APPLICATIONS

TUNABLE TEMPERATURE CONTROLLED SUBSTRATE SUPPORT ASSEMBLY

ADJUSTABLE DIELECTRIC CONSTANT CERAMIC WINDOW

COLLABORATIVE ROBOT SYSTEM ON A MOBILE CART WITH A CHAMBER DOCKING...

CARRIER RING FOR FLOATING TCP CHAMBER GAS PLATE

COLD EDGE LOW TEMPERATURE ELECTROSTATIC CHUCK

THIN SHADOW RING FOR LOW-TILT TRENCH ETCHING

Selected Reject Band Non-Radiofrequency-Coupling Tile and Associate...

MID-CHAMBER FLOW OPTIMIZER

MULTIZONE GAS DISTRIBUTION PLATE FOR TRENCH PROFILE OPTIMIZATION

PLANAR MULTI-LAYER RADIO FREQUENCY FILTERS INCLUDING STACKED COILS...

SYSTEMS AND METHODS FOR USING A TRANSFORMER TO ACHIEVE UNIFORMITY I...

SUBSTRATE SUPPORTS WITH INTEGRATED RF FILTERS

SEGMENTED GAS DISTRIBUTION PLATE FOR HIGH-POWER, HIGH-PRESSURE PROC...

Components and Processes for Managing Plasma Process Byproduct Mate...

CONSOLIDATED FILTER ARRANGEMENT FOR DEVICES IN AN RF ENVIRONMENT

SUBSTRATE PROCESSING SYSTEM INCLUDING COIL WITH RF POWERED FARADAY...

COIL AND WINDOW FOR PLASMA PROCESSING SYSTEM

TUNABLE TEMPERATURE CONTROLLED SUBSTRATE SUPPORT ASSEMBLY

SUBSTRATE CARRIER USING A PROPORTIONAL THERMAL FLUID DELIVERY SYSTEM

TUNABLE ESC FOR RAPID ALTERNATING PROCESS APPLICATIONS

Articulated Direct-Mount Inductor and Associated Systems and Methods

CONSOLIDATED FILTER ARRANGEMENT FOR DEVICES IN AN RF ENVIRONMENT

CONSOLIDATED FILTER ARRANGEMENT FOR DEVICES IN AN RF ENVIRONMENT

Universal Non-Invasive Chamber Impedance Measurement System and Ass...

SYSTEMS AND METHODS FOR RF POWER RATIO SWITCHING FOR ITERATIVE TRAN...

SUBSTRATE PROCESSING SYSTEM INCLUDING COIL WITH RF POWERED FARADAY...

TUNABLE TEMPERATURE CONTROLLED SUBSTRATE SUPPORT ASSEMBLY

CONSOLIDATED FILTER ARRANGEMENT FOR DEVICES IN AN RF ENVIRONMENT

CONTROL ARCHITECTURE FOR DEVICES IN AN RF ENVIRONMENT