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Jiangsu, CN
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Patents Grants
last 30 patents
Information
Patent Grant
Manufacturing method of MEMS chip
Patent number
10,077,188
Issue date
Sep 18, 2018
CSMC Technologies Fab1 Co., Ltd.
Dan Dai
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS chip and manufacturing method therefor
Patent number
9,580,301
Issue date
Feb 28, 2017
CSMC Technologies Fab1 Co., Ltd.
Dan Dai
B81 - MICRO-STRUCTURAL TECHNOLOGY
Patents Applications
last 30 patents
Information
Patent Application
METHOD FOR MANUFACTURING DUAL-CAVITY STRUCTURE, AND DUAL-CAVITY STR...
Publication number
20200216307
Publication date
Jul 9, 2020
CSMC TECHNOLOGIES FAB2 CO., LTD.
Dan Dai
B60 - VEHICLES IN GENERAL
Information
Patent Application
MANUFACTURING METHOD OF MEMS CHIP
Publication number
20170121175
Publication date
May 4, 2017
CSMC TECHNOLOGIES FAB1 CO., LTD.
Dan Dai
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD FOR FABRICATING MULTI-TRENCH STRUCTURE
Publication number
20150175409
Publication date
Jun 25, 2015
CSMC TECHNOLOGIES FAB1 CO., LTD.
Xinwei Zhang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS CHIP AND MANUFACTURING METHOD THEREFOR
Publication number
20150151958
Publication date
Jun 4, 2015
CSM TECHNOLOGIES FAB1 CO., LTD.
Dan Dai
B81 - MICRO-STRUCTURAL TECHNOLOGY