Dan Meisburger

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San Jose, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Lithography system and method for device manufacture
- Patent number 6,753,947
- Issue date Jun 22, 2004
- Ultratech Stepper, Inc.
- Dan Meisburger
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Motion compensation system and method for lithography
- Patent number 6,556,279
- Issue date Apr 29, 2003
- Ultratech Stepper, Inc.
- Dan Meisburger
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Inspecting optical masks with electron beam microscopy
- Patent number 5,717,204
- Issue date Feb 10, 1998
- KLA Instruments Corporation
- Dan Meisburger
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Inspecting optical masks with electron beam microscopy
- Patent number 5,665,968
- Issue date Sep 9, 1997
- KLA Instruments Corporation
- Dan Meisburger
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron beam inspection system and method
- Patent number 5,502,306
- Issue date Mar 26, 1996
- KLA Instruments Corporation
- Dan Meisburger
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
Lithography system and method for device manufacture
- Publication number 20020186359
- Publication date Dec 12, 2002
- Dan Meisburger
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY