Dan Prager

Person

Hopewell Junction, NY, US

People

Patents Grantslast 30 patents

Information Patent Grant
Contact processing using multi-input/multi-output (MIMO) models
- Patent number 8,532,796
- Issue date Sep 10, 2013
- Tokyo Electron Limited
- Daniel J Prager
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Differential metal gate etching process
- Patent number 8,501,628
- Issue date Aug 6, 2013
- Tokyo Electron Limited
- Vinh Hoang Luong
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Creating metal gate structures using Lithography-Etch-Lithography-E...
- Patent number 8,183,062
- Issue date May 22, 2012
- Tokyo Electron Limited
- Merritt Funk
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Creating multi-layer/multi-input/multi-output (MLMIMO) models for m...
- Patent number 8,019,458
- Issue date Sep 13, 2011
- Tokyo Electron Limited
- Merritt Funk
- G05 - CONTROLLING REGULATING
Information Patent Grant
Multi-layer/multi-input/multi-output (MLMIMO) models and method for...
- Patent number 7,967,995
- Issue date Jun 28, 2011
- Tokyo Electron Limited
- Merritt Funk
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for spacer-optimization (S-O)
- Patent number 7,939,450
- Issue date May 10, 2011
- Tokyo Electron Limited
- Asao Yamashita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for creating a gate optimization evaluation li...
- Patent number 7,899,637
- Issue date Mar 1, 2011
- Tokyo Electron Limited
- Asao Yamashita
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Using Multi-Layer/Multi-Input/Multi-Output (MLMIMO) models for meta...
- Patent number 7,894,927
- Issue date Feb 22, 2011
- Tokyo Electron Limited
- Merritt Funk
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for creating a Spacer-Optimization (S-O) library
- Patent number 7,765,077
- Issue date Jul 27, 2010
- Tokyo Electron Limited
- Asao Yamashita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for optimizing a gate channel
- Patent number 7,713,758
- Issue date May 11, 2010
- Tokyo Electon Limited
- Asao Yamashita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Dynamic metrology sampling with wafer uniformity control
- Patent number 7,567,700
- Issue date Jul 28, 2009
- Tokyo Electron Limited
- Merritt Funk
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Creating a virtual profile library
- Patent number 7,542,859
- Issue date Jun 2, 2009
- Tokyo Electron Ltd.
- Merritt Funk
- G01 - MEASURING TESTING
Information Patent Grant
Dynamic metrology sampling for a dual damascene process
- Patent number 7,502,709
- Issue date Mar 10, 2009
- Tokyo Electron, Ltd.
- Merritt Funk
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Feature dimension deviation correction system, method and program p...
- Patent number 7,502,660
- Issue date Mar 10, 2009
- International Business Machines Corporation
- David V. Horak
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Refining a virtual profile library
- Patent number 7,487,053
- Issue date Feb 3, 2009
- Tokyo Electron Limited
- Merritt Funk
- G01 - MEASURING TESTING
Information Patent Grant
Optical metrology model optimization for process control
- Patent number 7,395,132
- Issue date Jul 1, 2008
- Timbre Technologies, Inc.
- Daniel Prager
- G01 - MEASURING TESTING
Information Patent Grant
Iso/nested control for soft mask processing
- Patent number 7,328,418
- Issue date Feb 5, 2008
- Tokyo Electron Limited
- Asao Yamashita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Using a virtual profile library
- Patent number 7,305,322
- Issue date Dec 4, 2007
- Tokyo Electron Limited
- Merritt Funk
- G01 - MEASURING TESTING
Information Patent Grant
Feature dimension deviation correction system, method and program p...
- Patent number 7,289,864
- Issue date Oct 30, 2007
- International Business Machines Corporation
- David V. Horak
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Optical metrology model optimization for process control
- Patent number 7,221,989
- Issue date May 22, 2007
- Tokyo Electron Limited
- Dan Prager
- G01 - MEASURING TESTING
Information Patent Grant
Iso/nested cascading trim control with model feedback updates
- Patent number 7,209,798
- Issue date Apr 24, 2007
- Tokyo Electron Limited
- Asao Yamashita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Parametric optimization of optical metrology model
- Patent number 7,126,700
- Issue date Oct 24, 2006
- Timbre Technologies, Inc.
- Junwei Bao
- G01 - MEASURING TESTING
Information Patent Grant
Optical metrology model optimization for process control
- Patent number 7,065,423
- Issue date Jun 20, 2006
- Timbre Technologies, Inc.
- Dan Prager
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
Contact Processing Using Multi-Input/Multi-Output (MIMO) Models
- Publication number 20120253497
- Publication date Oct 4, 2012
- TOKYO ELECTRON LIMITED
- Daniel J. Prager
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Differential metal gate etching process
- Publication number 20110237084
- Publication date Sep 29, 2011
- TOKYO ELECTRON LIMITED
- Vinh Hoang LUONG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Creating Metal Gate Structures Using Lithography-Etch-Lithography-E...
- Publication number 20100214545
- Publication date Aug 26, 2010
- TOKYO ELECTRON LIMITED
- Merritt Funk
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Creating Multi-Layer/Multi-Input/Multi-Output (MLMIMO) Models for M...
- Publication number 20100036514
- Publication date Feb 11, 2010
- TOKYO ELECTRON LIMITED
- Merritt Funk
- G05 - CONTROLLING REGULATING
Information Patent Application
Using Multi-Layer/Multi-Input/Multi-Output (MLMIMO) Models for Meta...
- Publication number 20100036518
- Publication date Feb 11, 2010
- TOKYO ELECTRON LIMITED
- Merritt Funk
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Multi-Layer/Multi-Input/Multi-Output (MLMIMO) Models and Method for...
- Publication number 20090242513
- Publication date Oct 1, 2009
- TOKYO ELECTRON LIMITED
- Merritt Funk
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and Apparatus for Spacer-Optimization (S-O)
- Publication number 20090081815
- Publication date Mar 26, 2009
- TOKYO ELECTRON LIMITED
- Asao Yamashita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and Apparatus for Creating a Spacer-Optimization (S-O) Library
- Publication number 20090082983
- Publication date Mar 26, 2009
- TOKYO ELECTRON LIMITED
- Asao Yamashita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and Apparatus for Optimizing a Gate Channel
- Publication number 20080311687
- Publication date Dec 18, 2008
- TOKYO ELECTRON LIMITED
- Asao Yamashita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and Apparatus for Creating a Gate Optimization Evaluation Li...
- Publication number 20080311688
- Publication date Dec 18, 2008
- TOKYO ELECTRON LIMITED
- Asao Yamashita
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
FEATURE DIMENSION DEVIATION CORRECTION SYSTEM, METHOD AND PROGRAM P...
- Publication number 20080027577
- Publication date Jan 31, 2008
- David V. Horak
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Refining a virtual profile library
- Publication number 20070239383
- Publication date Oct 11, 2007
- Tokyo Electron, Ltd.
- Merritt Funk
- G01 - MEASURING TESTING
Information Patent Application
Dynamic metrology sampling with wafer uniformity control
- Publication number 20070238201
- Publication date Oct 11, 2007
- Merritt Funk
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Creating a virtual profile library
- Publication number 20070239369
- Publication date Oct 11, 2007
- Tokyo Electron, Ltd.
- Merritt Funk
- G01 - MEASURING TESTING
Information Patent Application
Dynamic metrology sampling with wafer uniformity control
- Publication number 20070237383
- Publication date Oct 11, 2007
- Merritt Funk
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Using a virtual profile library
- Publication number 20070233426
- Publication date Oct 4, 2007
- Tokyo Electron, Ltd.
- Merritt Funk
- G01 - MEASURING TESTING
Information Patent Application
Dynamic metrology sampling for a dual damascene process
- Publication number 20070231930
- Publication date Oct 4, 2007
- Merritt Funk
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Optical metrology model optimization for process control
- Publication number 20070225851
- Publication date Sep 27, 2007
- Timbre Technologies, Inc.
- Dan Prager
- G01 - MEASURING TESTING
Information Patent Application
Optical metrology model optimization for process control
- Publication number 20060247816
- Publication date Nov 2, 2006
- TOKYO ELECTRON LIMITED
- Dan Prager
- G01 - MEASURING TESTING
Information Patent Application
Iso/nested control for soft mask processing
- Publication number 20060195218
- Publication date Aug 31, 2006
- TOKYO ELECTRON LIMITED
- Asao Yamashita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Iso/nested cascading trim control with model feedback updates
- Publication number 20060064193
- Publication date Mar 23, 2006
- TOKYO ELECTRON LIMITED
- Asao Yamashita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Optical metrology model optimization for process control
- Publication number 20060009872
- Publication date Jan 12, 2006
- Timbre Technologies, Inc.
- Dan Prager
- G01 - MEASURING TESTING
Information Patent Application
FEATURE DIMENSION DEVIATION CORRECTION SYSTEM, METHOD AND PROGRAM P...
- Publication number 20060007453
- Publication date Jan 12, 2006
- International Business Machines Corporation
- David V. Horak
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Parametric optimization of optical metrology model
- Publication number 20050128489
- Publication date Jun 16, 2005
- Junwei Bao
- G01 - MEASURING TESTING

Person

Patents Grantslast 30 patents

Contact processing using multi-input/multi-output (MIMO) models

Differential metal gate etching process

Creating metal gate structures using Lithography-Etch-Lithography-E...

Creating multi-layer/multi-input/multi-output (MLMIMO) models for m...

Multi-layer/multi-input/multi-output (MLMIMO) models and method for...

Method and apparatus for spacer-optimization (S-O)

Method and apparatus for creating a gate optimization evaluation li...

Using Multi-Layer/Multi-Input/Multi-Output (MLMIMO) models for meta...

Method and apparatus for creating a Spacer-Optimization (S-O) library

Method and apparatus for optimizing a gate channel

Dynamic metrology sampling with wafer uniformity control

Creating a virtual profile library

Dynamic metrology sampling for a dual damascene process

Feature dimension deviation correction system, method and program p...

Refining a virtual profile library

Optical metrology model optimization for process control

Iso/nested control for soft mask processing

Using a virtual profile library

Feature dimension deviation correction system, method and program p...

Optical metrology model optimization for process control

Iso/nested cascading trim control with model feedback updates

Parametric optimization of optical metrology model

Optical metrology model optimization for process control

Patents Applicationslast 30 patents

Contact Processing Using Multi-Input/Multi-Output (MIMO) Models

Differential metal gate etching process

Creating Metal Gate Structures Using Lithography-Etch-Lithography-E...

Creating Multi-Layer/Multi-Input/Multi-Output (MLMIMO) Models for M...

Using Multi-Layer/Multi-Input/Multi-Output (MLMIMO) Models for Meta...

Multi-Layer/Multi-Input/Multi-Output (MLMIMO) Models and Method for...

Method and Apparatus for Spacer-Optimization (S-O)

Method and Apparatus for Creating a Spacer-Optimization (S-O) Library

Method and Apparatus for Optimizing a Gate Channel

Method and Apparatus for Creating a Gate Optimization Evaluation Li...

FEATURE DIMENSION DEVIATION CORRECTION SYSTEM, METHOD AND PROGRAM P...

Refining a virtual profile library

Dynamic metrology sampling with wafer uniformity control

Creating a virtual profile library

Dynamic metrology sampling with wafer uniformity control

Using a virtual profile library

Dynamic metrology sampling for a dual damascene process

Optical metrology model optimization for process control

Optical metrology model optimization for process control

Iso/nested control for soft mask processing

Iso/nested cascading trim control with model feedback updates

Optical metrology model optimization for process control

FEATURE DIMENSION DEVIATION CORRECTION SYSTEM, METHOD AND PROGRAM P...

Parametric optimization of optical metrology model