Dan Scott

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San Jose, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus to reduce thermal stress by regulation and con...
- Patent number 9,534,848
- Issue date Jan 3, 2017
- KLA-Tencor Corporation
- Jincheng Wang
- F28 - HEAT EXCHANGE IN GENERAL

Patents Applicationslast 30 patents

Information Patent Application
Method and Apparatus to Reduce Thermal Stress by Regulation and Con...
- Publication number 20140060792
- Publication date Mar 6, 2014
- KLA-Tencor Corporation
- Jincheng Wang
- F28 - HEAT EXCHANGE IN GENERAL