DAN ZHANG

Person

Fremont, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing system including dual ion filter for downstrea...
- Patent number 11,967,486
- Issue date Apr 23, 2024
- Lam Research Corporation
- Andrew Stratton Bravo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods for metastable activated radical selective stri...
- Patent number 11,694,911
- Issue date Jul 4, 2023
- Lam Research Corporation
- Dengliang Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Roller assembly for a brush cleaning device in a cleaning module
- Patent number 8,250,695
- Issue date Aug 28, 2012
- Applied Materials, Inc.
- Lakshmanan Karuppiah
- B08 - CLEANING
Information Patent Grant
Brush alignment control mechanism
- Patent number 8,181,302
- Issue date May 22, 2012
- Applied Materials, Inc.
- Hung Chih Chen
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING SYSTEM INCLUDING DUAL ION FILTER FOR DOWNSTREA...
- Publication number 20240266147
- Publication date Aug 8, 2024
- LAM RESEARCH CORPORATION
- Andrew Stratton BRAVO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS FOR METASTABLE ACTIVATED RADICAL SELECTIVE STRI...
- Publication number 20240258129
- Publication date Aug 1, 2024
- Lam Reseach Corporation
- Dengliang YANG
- B08 - CLEANING
Information Patent Application
SYSTEMS AND METHODS FOR METASTABLE ACTIVATED RADICAL SELECTIVE STRI...
- Publication number 20240258130
- Publication date Aug 1, 2024
- LAM RESEARCH CORPORATION
- Dengliang YANG
- B08 - CLEANING
Information Patent Application
SYSTEMS AND METHODS FOR METASTABLE ACTIVATED RADICAL SELECTIVE STRI...
- Publication number 20240258131
- Publication date Aug 1, 2024
- LAM RESEARCH CORPORATION
- Dengliang YANG
- B08 - CLEANING
Information Patent Application
SYSTEMS AND METHODS FOR METASTABLE ACTIVATED RADICAL SELECTIVE STRI...
- Publication number 20230369076
- Publication date Nov 16, 2023
- LAM RESEARCH CORPORATION
- Dengliang Yang
- B08 - CLEANING
Information Patent Application
PLASMA-EXCLUSION-ZONE RINGS FOR PROCESSING NOTCHED WAFERS
- Publication number 20230352278
- Publication date Nov 2, 2023
- LAM RESEARCH CORPORATION
- Xuefeng HUA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING SYSTEM INCLUDING DUAL ION FILTER FOR DOWNSTREA...
- Publication number 20220076924
- Publication date Mar 10, 2022
- LAM RESEARCH CORPORATION
- Andrew Stratton BRAVO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS FOR METASTABLE ACTIVATED RADICAL SELECTIVE STRI...
- Publication number 20180174870
- Publication date Jun 21, 2018
- LAM RESEARCH CORPORATION
- Dengliang Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VAPOR DRYER MODULE WITH REDUCED PARTICLE GENERATION
- Publication number 20150050105
- Publication date Feb 19, 2015
- Applied Materials, Inc.
- Dan Zhang
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
ROLLER ASSEMBLY FOR A BRUSH CLEANING DEVICE IN A CLEANING MODULE
- Publication number 20110079245
- Publication date Apr 7, 2011
- Applied Materials, Inc.
- Lakshmanan Karuppiah
- B08 - CLEANING
Information Patent Application
BRUSH ALIGNMENT CONTROL MECHANISM
- Publication number 20110067727
- Publication date Mar 24, 2011
- Applied Materials, Inc.
- HUNG CHIH CHEN
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE

Person

Patents Grantslast 30 patents

Substrate processing system including dual ion filter for downstrea...

Systems and methods for metastable activated radical selective stri...

Roller assembly for a brush cleaning device in a cleaning module

Brush alignment control mechanism

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING SYSTEM INCLUDING DUAL ION FILTER FOR DOWNSTREA...

SYSTEMS AND METHODS FOR METASTABLE ACTIVATED RADICAL SELECTIVE STRI...

SYSTEMS AND METHODS FOR METASTABLE ACTIVATED RADICAL SELECTIVE STRI...

SYSTEMS AND METHODS FOR METASTABLE ACTIVATED RADICAL SELECTIVE STRI...

SYSTEMS AND METHODS FOR METASTABLE ACTIVATED RADICAL SELECTIVE STRI...

PLASMA-EXCLUSION-ZONE RINGS FOR PROCESSING NOTCHED WAFERS

SUBSTRATE PROCESSING SYSTEM INCLUDING DUAL ION FILTER FOR DOWNSTREA...

SYSTEMS AND METHODS FOR METASTABLE ACTIVATED RADICAL SELECTIVE STRI...

VAPOR DRYER MODULE WITH REDUCED PARTICLE GENERATION

ROLLER ASSEMBLY FOR A BRUSH CLEANING DEVICE IN A CLEANING MODULE

BRUSH ALIGNMENT CONTROL MECHANISM